
Last modified: 2018-09-04 10:00:00
Authors and Chairs (J) field exact matches “米澤 喜幸”; 1 program is found.
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| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 2 | CD217 | Investigation of trench-filling mechanism and the effect of adding HCl during 4H-SiC CVD | 4H-SiC trench filling HCl | ST-25 | 142 |
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SCEJ 50th Autumn Meeting (Kagoshima, 2018)
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