
Title (J) field includes “化学気相成長法”; 1 program is found.
The search results are sorted by the start time.
| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 3 | K313 | [Invited lecture] Characterization of silicon and nitrogen doped diamond-like carbon thin films prepared by plasma-enhanced chemical vapor deposition | diamond-like carbon plasma-enhanced chemical vapor deposition silicon | ST-22 | 248 |
Technical program
Technical sessions (Wide)
(For narrow screen)
Session programs
Search in technical program
SCEJ 51st Autumn Meeting (2020)
© 2023 The Society of Chemical Engineers, Japan. All rights reserved.
www3.scej.org