SCEJ 51st Autumn Meeting (2020)
Program search result : 原子層堆積法 : 2 programs
All sessions can be attended from the On-line (Virtual) Meeting Site.
Preprints(Abstracts) are now open. Click the Paper IDs. (Registered participants and invited persons only)
The ID/PW was sent on Sept. 10 (for earlybird registered participants) or on Sept. 23 (for on-site registered participants).
(Aug. 8) Flash session of SY-69 has been cancelled.
(Aug. 24,27) Schedule of SY-74 (X306, X307) and HQ-11 (D301) has been changed.
Preprints(Abstracts) are now open. Click the Paper IDs. (Registered participants and invited persons only)
The ID/PW was sent on Sept. 10 (for earlybird registered participants) or on Sept. 23 (for on-site registered participants).
(Aug. 8) Flash session of SY-69 has been cancelled.
(Aug. 24,27) Schedule of SY-74 (X306, X307) and HQ-11 (D301) has been changed.
Title (J) field includes “原子層堆積法”; 2 programs are found. (“Poster with Flash” presentations are double-counted.)
The search results are sorted by the start time.
| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 1 | B123 | [Invited lecture] Development of room-temperature atomic layer deposition and application to ion exchange adsorption membrane | JISSO Tohoku Deposition | SP-1 | 870 |
| Day 3 | K308 | [Review lecture] Concept, design and future of semi-batch type ALD equipment and process | ALD Equipment Semi-Batch | ST-22 | 111 |
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SCEJ 51st Autumn Meeting (2020)
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