
Keywords field exact matches “plasma-enhanced chemical vapor deposition”; 2 programs are found. (“Poster with Flash” presentations are double-counted.)
The search results are sorted by the start time.
| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 3 | K303 | ZnO coating of carbon nanotubes by in-flight PECVD method | plasma-enhanced chemical vapor deposition nanocoating aerosol | ST-22 | 310 |
| Day 3 | K313 | [Invited lecture] Characterization of silicon and nitrogen doped diamond-like carbon thin films prepared by plasma-enhanced chemical vapor deposition | diamond-like carbon plasma-enhanced chemical vapor deposition silicon | ST-22 | 248 |
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SCEJ 51st Autumn Meeting (2020)
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