11-c - Program search result - SCEJ 86th Annual Meeting (2021)

`SCEJ 86th Annual Meeting (2021)`

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Program search result : 11-c : 1 program

The preprints(abstracts) are now open (Mar. 8th). These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants (excludes free registration) and invited persons are required.

Topics Code field begins with “11-c”; 1 program is found.
The search results are sorted by the start time.

Time	Paper ID	Title / Authors	Keywords	Topic code	Ack. number
Day 1 16:20– 16:40	N123	ClF3 gas distributor design for SiC wafer etching (Yokohama Nat. U.) Hayashi Masaya, *(Reg)Habuka Hitoshi, (Kanto Denka Kogyo) (Cor)Takahashi Yoshinao, (AIST) Kato Tomohisa	SiC Wafer etching CLF3 gas	11-c	43

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SCEJ 86th Annual Meeting (2021)

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