SCEJ 86th Annual Meeting (2021)
Program search result : 次反応 : 1 program
The preprints(abstracts) are now open (Mar. 8th). These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants (excludes free registration) and invited persons are required.
Title (J) field includes “次反応”; 1 program is found.
The search results are sorted by the start time.
| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 3 | K317 | Conformal growth of SiC onto trenches by CVI from MTS/H2 with using quasi-0th-order reaction and sacrificial layer | SiC CVD CVI | 5-h | 383 |
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SCEJ 86th Annual Meeting (2021)
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