BCL3 - Program search result - SCEJ 86th Annual Meeting (2021)

`SCEJ 86th Annual Meeting (2021)`

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Program search result : BCL3 : 1 program

The preprints(abstracts) are now open (Mar. 8th). These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants (excludes free registration) and invited persons are required.

Keywords field exact matches “BCL3”; 1 program is found.
The search results are sorted by the start time.

Time	Paper ID	Title / Authors	Keywords	Topic code	Ack. number
Day 3 15:00– 15:20	K319	Si-B film formation using boron trichloride and dichlorosilane gases (Yokohama Nat. U.) Otani Mana, Muroi Mitsuko, *(Reg)Habuka Hitoshi	Silicon-boron CVD BCL3	5-h	42

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SCEJ 86th Annual Meeting (2021)

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