SiC - Program search result - SCEJ 86th Annual Meeting (2021)

`SCEJ 86th Annual Meeting (2021)`

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Program search result : SiC : 3 programs

The preprints(abstracts) are now open (Mar. 8th). These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants (excludes free registration) and invited persons are required.

Keywords field exact matches “SiC”; 3 programs are found.
The search results are sorted by the start time.

Time	Paper ID	Title / Authors	Keywords	Topic code	Ack. number
Day 1 14:20– 15:20	PA128	Development of chlorine-free SiC-CVI process to achieve uniform infiltration without particle generation (U. Tokyo) *(Stu)Kondo Yoshifumi, (Stu)Aji Ryosuke, (Stu)Otaka Yuhei, (Reg)Sato Noboru, (IHI) (Reg)Fukushima Yasuyuki, (U. Tokyo) (Reg)Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro	SiC CVI CVD	5-h	506
Day 1 16:20– 16:40	N123	ClF3 gas distributor design for SiC wafer etching (Yokohama Nat. U.) Hayashi Masaya, *(Reg)Habuka Hitoshi, (Kanto Denka Kogyo) (Cor)Takahashi Yoshinao, (AIST) Kato Tomohisa	SiC Wafer etching CLF3 gas	11-c	43
Day 3 14:20– 14:40	K317	Conformal growth of SiC onto trenches by CVI from MTS/H₂ with using quasi-0th-order reaction and sacrificial layer (U. Tokyo) *(Stu)Otaka Yuhei, (Reg)Sato Noboru, (Stu)Kondo Yoshifumi, (IHI) (Reg)Fukushima Yasuyuki, (U. Tokyo) (Reg)Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro	SiC CVD CVI	5-h	383

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SCEJ 86th Annual Meeting (2021)

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