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SCEJ 51st Autumn Meeting (2020)

Program search result : 川上 雅人 : 1 program

All sessions can be attended from the On-line (Virtual) Meeting Site.
Preprints(Abstracts) are now open. Click the Paper IDs. (Registered participants and invited persons only)
The ID/PW was sent on Sept. 10 (for earlybird registered participants) or on Sept. 23 (for on-site registered participants).
(Aug. 8) Flash session of SY-69 has been cancelled.
(Aug. 24,27) Schedule of SY-74 (X306, X307) and HQ-11 (D301) has been changed.

Authors and Chairs (J) field exact matches “川上 雅人”; 1 program is found.
The search results are sorted by the start time.

TimePaper
ID		Title / AuthorsKeywordsTopic codeAck.
number
Day 2
14:20– 15:20		   Chair: Kawakami Masato
K217Kinetic analysis of TiAlN-CVD process for construction of reaction model (2)
(U. Tokyo) *(Stu)Yamaguchi Jun, Hirabaru Tomoko, (Kyocera) (Cor)Kubo Hayato, (U. Tokyo) (Reg)Deura Momoko, (Reg)Momose Takeshi, (Kyocera) (Cor)Tanibuchi Takahito, (U. Tokyo) (Reg)Shimogaki Yukihiro
CVD
TiAlN
cutting tool
ST-22153
K218Synthesis of AlOx thin films by mist-CVD for electrical insulator layer of FETs
(Saitama U.) *(Stu)Arifuzzaman Rajib, Shida Tomohiro, Abdul Kuddus, Ueno Keiji, Shirai Hajime
mist-CVD
AlOx
ST-22306
K219Fabrication of SiO2 and Al2O3 insulator film by mist chemical vapor deposition
(U. Tokyo) *(Stu)Kinoshita Sayaka, (U. Tokyo ESC) (Reg)Sakai Enju, (U. Tokyo/U. Tokyo) (Reg)Tsuji Yoshiko
insulator
thin-film-transistor
mist chemical vapor deposition
ST-22135

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SCEJ 51st Autumn Meeting (2020)

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