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SCEJ 51st Autumn Meeting (2020)

Program search result : CVD : 10 programs

All sessions can be attended from the On-line (Virtual) Meeting Site.
Preprints(Abstracts) are now open. Click the Paper IDs. (Registered participants and invited persons only)
The ID/PW was sent on Sept. 10 (for earlybird registered participants) or on Sept. 23 (for on-site registered participants).
(Aug. 8) Flash session of SY-69 has been cancelled.
(Aug. 24,27) Schedule of SY-74 (X306, X307) and HQ-11 (D301) has been changed.

Keywords field exact matches “CVD”; 10 programs are found. (“Poster with Flash” presentations are double-counted.)
The search results are sorted by the start time.

TimePaper
ID		Title / AuthorsKeywordsTopic codeAck.
number
Day 1
9:00– 10:30		PA107Simulation of a CVD reactor with detailed reaction mechanism and OpenFOAM
(Nagoya U.) *(Stu·PCEF)Furuta Ryo, (Int)Zhang Wei, (Reg)Machida Hiroshi, (Reg)Norinaga Koyo
CVD
Simulation
OpenFOAM
SY-64717
Day 1
12:40– 13:40		PA107Simulation of a CVD reactor with detailed reaction mechanism and OpenFOAM
(Nagoya U.) *(Stu·PCEF)Furuta Ryo, (Int)Zhang Wei, (Reg)Machida Hiroshi, (Reg)Norinaga Koyo
CVD
Simulation
OpenFOAM
SY-64717
Day 2
10:40– 11:00		K206Effects of the central metals of perovskite thin film on structure
(Kyoto U.) *(Stu·PCEF)Matsuda Megumi, (Stu)Murakami Takanori, (Stu)Matsumura Nanzuki, (Reg)Kawase Motoaki
CVD
perovskite
central metals
ST-22414
Day 2
13:20– 13:40		K214Effect of SiCl4 addition for SiC-CVD from MTS/H2
(U. Tokyo) *(Stu)Otaka Yuhei, (Stu)Aji Ryosuke, (Stu)Sato Noboru, (IHI) (Reg)Fukushima Yasuyuki, (U. Tokyo) (Reg)Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro
CVD
SiC
Recycle
ST-22556
Day 2
14:20– 14:40		K217Kinetic analysis of TiAlN-CVD process for construction of reaction model (2)
(U. Tokyo) *(Stu)Yamaguchi Jun, Hirabaru Tomoko, (Kyocera) (Cor)Kubo Hayato, (U. Tokyo) (Reg)Deura Momoko, (Reg)Momose Takeshi, (Kyocera) (Cor)Tanibuchi Takahito, (U. Tokyo) (Reg)Shimogaki Yukihiro
CVD
TiAlN
cutting tool
ST-22153
Day 2
15:00– 15:20		I219Effect of steam on pyrolyitic carbon CVD
(Kyoto U.) *(Stu·PCEF)Minami Ryoga, (Stu·PCEF)Matsuda Megumi, (Reg)Kawase Motoaki
CVD
Carbon
Steam
SY-63251
Day 3
9:00– 9:20		K301Continuous synthesis of carbon nanoparticle-nanotube composite by high-temperature pyrolysis of acetylene
(Waseda U.) *(Stu)Urata Yua, Otahara Ryoya, (Reg)Osawa Toshio, (Reg)Sugime Hisashi, (Denka) Nako Yuki, Okada Takuya, (Waseda U.) (Reg)Noda Suguru
Carbon nanoparticle
Carbon nanotube
CVD
ST-22175
Day 3
10:00– 10:20		K304QCM for evaluating gas flow in Minimal-CVD reactor
(Yokohama Nat. U.) Otani Mana, *(Reg)Habuka Hitoshi, (Minimal Fab) Ikeda Shin-ichi, Ishida Yuuki, Hara Shiro
CVD
QCM
Minimal
ST-2262
Day 3
10:40– 11:00		K306Reaction mechanism analysis of polycrystalline SiC-CVD for high-speed, uniform growth process design
(U. Tokyo) *(Stu)Oku T., (Reg)Deura M., (Reg)Momose T., (Reg)Shimogaki Y.
Reaction model
SiC
CVD
ST-22499
Day 3
13:20– 13:40		K314Residual stress in gas barrier silica film prepared by plasma chemical vapor deposition
(Kyoto U.) *(Reg)Kawase M., (Stu)Hirata S., (Stu)Wakisaka T.
CVD
Residual stress
Silica gas barrier film
ST-2213

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SCEJ 51st Autumn Meeting (2020)

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