Noda Suguru (Waseda Univ.), Shimoyama Yusuke (Tokyo Tech), Kawakami Masato (Tokyo Electron Technology Solutions), Momose Wataru (ALD Japan) |
Dry processes such as CVD and ALD have become important core technologies in various fields such as electronics, energy devices, and functional coatings. In this symposium, the reaction mechanisms of thin film formation, fine particle synthesis, and microfabrication using dry processes will be understood from the viewpoint of reaction engineering, and rational and efficient reaction processes and reaction devices will be discussed. The CVD Reaction Subdivision Incentive Award will be presented to the young researcher who makes the best presentation.
Most recent update: 2023-05-10 05:20:01
The keywords that frequently used in this topics code. | Keywords | Number | |
---|---|---|---|
chemical vapor deposition | 3 | ||
ALD | 2 | ||
Surface modification | 1 |
ACKN No. | Title/Author(s) | Keywords | Style |
---|---|---|---|
9 | Boron Doping Method using BCl3 gas for Silicon Minimal CVD | Minimal Fab Silicon CVD Boron Doping | O |
119 | [Review lecture] Crystalline materials frontier opened by flux-coating method | Flux method Crystalline layer Environmental and energy devices | O |
198 | [Invited lecture] Microstructure and functionality of non-oxide ceramic layers by laser-assisted chemical vapor deposition | chemical vapor deposition laser microstructure | O |
221 | [Review lecture] Improvement of prediction accuracy of W-ALD deposition rate by machine learning | Machine Learning ALD Simulation | O |
237 | Functional protective film coating method by vacuum ultraviolet light irradiation | Vacuum ultraviolet light Polymer coating Surface modification | O |
239 | Continuous gas-phase CVD synthesis of single-wall carbon nanotubes via rapid heating of catalyst source | carbon nanotube chemical vapor deposition nanoparticle catalyst | O |
407 | Investigation of AlN thin film synthesis method using alkylaluminum | chemical vapor deposition AlN trimethylaluminium | O |
437 | Preparation of ZnO-TiO2-CNT by in-flight PECVD coating process | photocatalytic activity composite material aerosol process | O |
450 | Investigation of fast filling conditions using high concentration hydrogen supply in SiC-CVI process | SiC CVI CVD | O |
497 | Washing of surface modified magnetite nanoparticles using supercritical CO2 | carbon dioxide magnetite nanoparticles supercritical washing | O |
528 | Effect of temperature and pressure on synthesis of magnetic Iron oxide nanoparticles in super critical carbon dioxide | supercritical CO2 magnetic nanoparticle temperature and pressure | O |
599 | Density Function Theory Study of Cu Acetylacetonate Dissociative Adsorption on Cu (111) surface | Atomic Layer Depositon Density Function Theory Surface Adsorption | O |
617 | Examination of Co-ALD process using CCTBA | ALD cobalt CCTBA | O |
686 | Study of estimating vapor pressure of metal complex with COSMO-SAC method | vapor pressure metal complex COSMO-SAC | O |