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SCEJ 53rd Autumn Meeting (Nagano, 2022)

List of received applications (By topics code)


ST) SCEJ Trans-Division Symposium

ST-24. [Trans-Division Symposium] CVD and Dry Processes <Live/Virtual>

Organizer(s): Noda Suguru (Waseda Univ.), Shimoyama Yusuke (Tokyo Tech), Kawakami Masato (Tokyo Electron Technology Solutions), Momose Wataru (ALD Japan)

Dry processes such as CVD and ALD have become important core technologies in various fields such as electronics, energy devices, and functional coatings. In this symposium, the reaction mechanisms of thin film formation, fine particle synthesis, and microfabrication using dry processes will be understood from the viewpoint of reaction engineering, and rational and efficient reaction processes and reaction devices will be discussed. The CVD Reaction Subdivision Incentive Award will be presented to the young researcher who makes the best presentation.

Most recent update: 2023-05-10 05:20:01

The keywords that frequently used
in this topics code.
KeywordsNumber
chemical vapor deposition3*
ALD2
Surface modification1

ACKN
No.
Title/Author(s)KeywordsStyle
9Boron Doping Method using BCl3 gas for Silicon Minimal CVD
(Yokohama Nat. U.) Kamochi Yuki, *(Reg)Habuka Hitoshi, (Minimal Fab./AIST) Ikeda Shin-ichi, Ishida Yuuki, Hara Shiro
Minimal Fab
Silicon CVD
Boron Doping
O
119[Review lecture] Crystalline materials frontier opened by flux-coating method
(Shinshu U.) *Teshima Katsuya, Yamada Tetsuya, Hayashi Fumitaka, (Tokyo U. Sci/Shinshu U.) Terashima Chiaki
Flux method
Crystalline layer
Environmental and energy devices
O
198[Invited lecture] Microstructure and functionality of non-oxide ceramic layers by laser-assisted chemical vapor deposition
(AIST) *Katsui Hirokazu, Hotta Mikinori, (Nagoya U.) Harada Katsuyoshi, (NIMS) Shimoda Kazuya
chemical vapor deposition
laser
microstructure
O
221[Review lecture] Improvement of prediction accuracy of W-ALD deposition rate by machine learning
(TTS) *Aita Michitaka, Yamasaki Hideaki, Hotta Takanobu, Kawaguchi Takuya, Narushima Kensaku, Kubo Atsushi, Mochizuki Seiichiro, Takagi Toshio
Machine Learning
ALD
Simulation
O
237Functional protective film coating method by vacuum ultraviolet light irradiation
(Gifu U.) *(Stu)Yokoi Akino, (Reg)Hayakawa Yukio, (Reg)Kambara Shinji
Vacuum ultraviolet light
Polymer coating
Surface modification
O
239Continuous gas-phase CVD synthesis of single-wall carbon nanotubes via rapid heating of catalyst source
(Waseda U.) *(Stu)Chikaarashi Itsuki, (Reg)Ohsawa Toshio, (Reg)Noda Suguru
carbon nanotube
chemical vapor deposition
nanoparticle catalyst
O
407Investigation of AlN thin film synthesis method using alkylaluminum
(Kyoto U.) *(Stu)Murahashi Kousuke, Li Yafei, (Reg)Kageyama Miho, (Reg)Kawase Motoaki
chemical vapor deposition
AlN
trimethylaluminium
O
437Preparation of ZnO-TiO2-CNT by in-flight PECVD coating process
(Hiroshima U.) *(Stu)Kawahara Junto, (Reg)Kubo Masaru, (Reg)Shimada Manabu
photocatalytic activity
composite material
aerosol process
O
450Investigation of fast filling conditions using high concentration hydrogen supply in SiC-CVI process
(U. Tokyo) *(Stu)Kimura Shunsuke, (Stu)Otaka Yuhei, (Reg)Sato Noboru, (IHI) (Reg)Fukushima Yasuyuki, (U. Tokyo) Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro
SiC
CVI
CVD
O
497Washing of surface modified magnetite nanoparticles using supercritical CO2
(Tokyo Tech) *(Reg)Orita Yasuhiko, Ikeda Kai, (Stu)Wijakmatee Thossaporn, (Reg)Shimoyama Yusuke
carbon dioxide
magnetite nanoparticles
supercritical washing
O
528Effect of temperature and pressure on synthesis of magnetic Iron oxide nanoparticles in super critical carbon dioxide
(Tokyo Tech) *(Stu)Kariya Keito, (Reg)Orita Yasuhiko, (Reg)Shimoyama Yusuke
supercritical CO2
magnetic nanoparticle
temperature and pressure
O
599Density Function Theory Study of Cu Acetylacetonate Dissociative Adsorption on Cu (111) surface
(U. Tokyo) *(Stu)Wu Yuxuan, (Reg)Sato Noboru, (Stu)Yamaguchi Jun, Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro
Atomic Layer Depositon
Density Function Theory
Surface Adsorption
O
617Examination of Co-ALD process using CCTBA
(U. Tokyo) *(Stu)Yamaguchi Jun, (Reg)Sato Noboru, Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro
ALD
cobalt
CCTBA
O
686Study of estimating vapor pressure of metal complex with COSMO-SAC method
(U. Tokyo) *(Reg)Sato Noboru, (Stu)Yamaguchi Jun, (Stu)Wu Yuxuan, Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro
vapor pressure
metal complex
COSMO-SAC
O

List of received applications (By topics code)

List of received applications
SCEJ 53rd Autumn Meeting (Nagano, 2022)

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Most recent update: 2023-05-10 05:20:01
For more information contact Organizing Committee, SCEJ 53rd Autumn Meeting (Nagano, 2022)
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