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SCEJ 85th Annual Meeting (2020)

Last modified: 2020-03-02 11:00:00

Program search result : 理論検討 : 1 program

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Title (J) field includes “理論検討”; 1 program is found.
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TimePaper
ID
Title / AuthorsKeywordsTopic codeAck.
number
Day 3
13:0014:40
J313Theoretical study for modeling surface reactions on SiC-CVI process
(U. Tokyo) *(Stu)Sato Noboru, (Stu)Otaka Yuhei, (Stu)Aji Ryosuke, (IHI) (Reg)Fukushima Yasuyuki, (U. Tokyo) (Reg)Deura Momoko, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro
CH3SiCl3
SiC CVI
surface reaction
5-h222

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SCEJ 85th Annual Meeting (2020)


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