
Title (J) field includes “塩素”; 3 programs are found.
The search results are sorted by the start time.
| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 1 | PA128 | Development of chlorine-free SiC-CVI process to achieve uniform infiltration without particle generation | SiC CVI CVD | 5-h | 506 |
| Day 1 | N123 | ClF3 gas distributor design for SiC wafer etching | SiC Wafer etching CLF3 gas | 11-c | 43 |
| Day 3 | E303 | [Requested talk] Some examples of degradation of polyvinyl chloride by sodium hypochlorite | oxidative degradation PVC sodium hypochlorite | F-1 | 670 |
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SCEJ 86th Annual Meeting (2021)
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