SCEJ 87th Annual Meeting (Kobe, 2022)
Last modified: 2022-03-04 12:00:00
Program search result : Sato Noboru : 4 programs
Program of CS-2 is updated.
The preprints are now open (Mar. 2nd). These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants in Period I/II and invited persons are required. (The participants registered in Period III will get the ID/PW on Mar. 15th.)
The yellow back on the Technical sessions page denotes streaming-live session. (HQ-21 is changed to online.)
The preprints are now open (Mar. 2nd). These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants in Period I/II and invited persons are required. (The participants registered in Period III will get the ID/PW on Mar. 15th.)
The yellow back on the Technical sessions page denotes streaming-live session. (HQ-21 is changed to online.)
Authors field exact matches “Sato Noboru”; 4 programs are found.
The search results are sorted by the start time.
| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 3 | L318 | Comparative study on precursors in Co-ALD process | ALD cobalt precursor | 5-h | 585 |
| Day 3 | L319 | Density Function Theory Study of Cu(II) Acetylacetonate Adsorption on Cu (111) surface | Atomic Layer Depositon Density Function Theory Surface Adsorption | 5-h | 110 |
| Day 3 | L322 | Construction of surface reaction model of TiAlN-CVD based on theoretical study | TiAlN CVD Surface reaction kinetics | 5-h | 578 |
| Day 3 | L323 | Consideration of the factors of more uniform growth in SiC-CVI from MTS/H2 by addition of SiCl4 | SiC CVI CMC | 5-h | 511 |
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SCEJ 87th Annual Meeting (Kobe, 2022)
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