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SCEJ 53rd Autumn Meeting (Nagano, 2022)
Program search result : Kawakami Masato : 1 program
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Yellow-back sessions on Technical sessions will be On-site/online Hybrid sessions, others are Online sessions.
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Yellow-back sessions on Technical sessions will be On-site/online Hybrid sessions, others are Online sessions.
Please check notices on menu page.
Authors field exact matches “Kawakami Masato”; 1 program is found.
The search results are sorted by the start time.
| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 1 | Chair: | ||||
| DJ113 | [Review lecture] Improvement of prediction accuracy of W-ALD deposition rate by machine learning | Machine Learning ALD Simulation | ST-24 | 221 | |
| DJ115 | Examination of Co-ALD process using CCTBA | ALD cobalt CCTBA | ST-24 | 617 | |
| DJ116 | [Featured presentation] Boron Doping Method using BCl3 gas for Silicon Minimal CVD | Minimal Fab Silicon CVD Boron Doping | ST-24 | 9 | |
| DJ117 | Study of estimating vapor pressure of metal complex with COSMO-SAC method | vapor pressure metal complex COSMO-SAC | ST-24 | 686 | |
| DJ118 | Functional protective film coating method by vacuum ultraviolet light irradiation | Vacuum ultraviolet light Polymer coating Surface modification | ST-24 | 237 | |
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SCEJ 53rd Autumn Meeting (Nagano, 2022)
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