Last modified: 2023-05-16 07:24:56
Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
---|---|---|---|---|---|
ST-24 [Trans-Division Symposium] CVD and Dry Processes | |||||
(10:00–11:40) (Chair: | |||||
DJ104 | [Review lecture] Crystalline materials frontier opened by flux-coating method | Flux method Crystalline layer Environmental and energy devices | ST-24 | 119 | |
DJ106 | Investigation of fast filling conditions using high concentration hydrogen supply in SiC-CVI process | SiC CVI CVD | ST-24 | 450 | |
DJ107 | Investigation of AlN thin film synthesis method using alkylaluminum | chemical vapor deposition AlN trimethylaluminium | ST-24 | 407 | |
DJ108 | Density Function Theory Study of Cu Acetylacetonate Dissociative Adsorption on Cu (111) surface | Atomic Layer Depositon Density Function Theory Surface Adsorption | ST-24 | 599 | |
(13:00–15:00) (Chair: | |||||
DJ113 | [Review lecture] Improvement of prediction accuracy of W-ALD deposition rate by machine learning | Machine Learning ALD Simulation | ST-24 | 221 | |
DJ115 | Examination of Co-ALD process using CCTBA | ALD cobalt CCTBA | ST-24 | 617 | |
DJ116 | [Featured presentation] Boron Doping Method using BCl3 gas for Silicon Minimal CVD | Minimal Fab Silicon CVD Boron Doping | ST-24 | 9 | |
DJ117 | Study of estimating vapor pressure of metal complex with COSMO-SAC method | vapor pressure metal complex COSMO-SAC | ST-24 | 686 | |
DJ118 | Functional protective film coating method by vacuum ultraviolet light irradiation | Vacuum ultraviolet light Polymer coating Surface modification | ST-24 | 237 | |
(15:10–17:00) (Chair: | |||||
DJ119 | [Invited lecture] Microstructure and functionality of non-oxide ceramic layers by laser-assisted chemical vapor deposition | chemical vapor deposition laser microstructure | ST-24 | 198 | |
DJ121 | Preparation of ZnO-TiO2-CNT by in-flight PECVD coating process | photocatalytic activity composite material aerosol process | ST-24 | 437 | |
DJ122 | Effect of temperature and pressure on synthesis of magnetic Iron oxide nanoparticles in super critical carbon dioxide | supercritical CO2 magnetic nanoparticle temperature and pressure | ST-24 | 528 | |
DJ123 | Continuous gas-phase CVD synthesis of single-wall carbon nanotubes via rapid heating of catalyst source | carbon nanotube chemical vapor deposition nanoparticle catalyst | ST-24 | 239 | |
DJ124 | Washing of surface modified magnetite nanoparticles using supercritical CO2 | carbon dioxide magnetite nanoparticles supercritical washing | ST-24 | 497 |
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SCEJ 53rd Autumn Meeting (Nagano, 2022)