Last modified: 2023-05-16 07:24:56
Dry processes such as CVD and ALD have become important core technologies in various fields such as electronics, energy devices, and functional coatings. In this symposium, the reaction mechanisms of thin film formation, fine particle synthesis, and microfabrication using dry processes will be understood from the viewpoint of reaction engineering, and rational and efficient reaction processes and reaction devices will be discussed. The CVD Reaction Subdivision Incentive Award will be presented to the young researcher who makes the best presentation.
Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
---|---|---|---|---|---|
Hall DJ, Day 1 | |||||
(10:00–11:40) (Chair: | |||||
DJ104 | [Review lecture] Crystalline materials frontier opened by flux-coating method | Flux method Crystalline layer Environmental and energy devices | ST-24 | 119 | |
DJ106 | Investigation of fast filling conditions using high concentration hydrogen supply in SiC-CVI process | SiC CVI CVD | ST-24 | 450 | |
DJ107 | Investigation of AlN thin film synthesis method using alkylaluminum | chemical vapor deposition AlN trimethylaluminium | ST-24 | 407 | |
DJ108 | Density Function Theory Study of Cu Acetylacetonate Dissociative Adsorption on Cu (111) surface | Atomic Layer Depositon Density Function Theory Surface Adsorption | ST-24 | 599 | |
(13:00–15:00) (Chair: | |||||
DJ113 | [Review lecture] Improvement of prediction accuracy of W-ALD deposition rate by machine learning | Machine Learning ALD Simulation | ST-24 | 221 | |
DJ115 | Examination of Co-ALD process using CCTBA | ALD cobalt CCTBA | ST-24 | 617 | |
DJ116 | [Featured presentation] Boron Doping Method using BCl3 gas for Silicon Minimal CVD | Minimal Fab Silicon CVD Boron Doping | ST-24 | 9 | |
DJ117 | Study of estimating vapor pressure of metal complex with COSMO-SAC method | vapor pressure metal complex COSMO-SAC | ST-24 | 686 | |
DJ118 | Functional protective film coating method by vacuum ultraviolet light irradiation | Vacuum ultraviolet light Polymer coating Surface modification | ST-24 | 237 | |
(15:10–17:00) (Chair: | |||||
DJ119 | [Invited lecture] Microstructure and functionality of non-oxide ceramic layers by laser-assisted chemical vapor deposition | chemical vapor deposition laser microstructure | ST-24 | 198 | |
DJ121 | Preparation of ZnO-TiO2-CNT by in-flight PECVD coating process | photocatalytic activity composite material aerosol process | ST-24 | 437 | |
DJ122 | Effect of temperature and pressure on synthesis of magnetic Iron oxide nanoparticles in super critical carbon dioxide | supercritical CO2 magnetic nanoparticle temperature and pressure | ST-24 | 528 | |
DJ123 | Continuous gas-phase CVD synthesis of single-wall carbon nanotubes via rapid heating of catalyst source | carbon nanotube chemical vapor deposition nanoparticle catalyst | ST-24 | 239 | |
DJ124 | Washing of surface modified magnetite nanoparticles using supercritical CO2 | carbon dioxide magnetite nanoparticles supercritical washing | ST-24 | 497 |
Technical program
Technical sessions (Wide)
(For narrow screen)
Session programs
Search in technical program
SCEJ 53rd Autumn Meeting (Nagano, 2022)