SCEJ 54th Autumn Meeting
Sep. 11 (Mon) - Sep. 13 (Wed), 2023
Fukuoka University, Nanakuma Campus
| Nishida Satoshi (Gifu Univ.), Momose Takeshi (Kumamoto Univ.), Shimizu Hideharu (Taiyo Nippon Sanso) |
Most recent update: 2024-04-11 13:19:01
 The keywords that frequently used in this topics code. | Keywords | Number | |
|---|---|---|---|
| ALD | 4 |  | |
| CVD | 3 | | |
| Chemical vapor deposition | 2 | | |
| PECVD | 2 | | |
| CVI | 2 | | |
| sputtering | 2 | | |
| SiC | 2 | | |
| cobalt | 2 | | |
| photocatalyst | 1 | | |
| ACKN No. | Title/Author(s) | Keywords | Style |
|---|---|---|---|
| 76 | Production of silicon-carbon composite materials by chemical vapor deposition for negative electrode of lithium-ion battery | Chemical Vapor Deposition (CVD) Silicon Lithium-ion battery | O |
| 94 | Precursor interactions for SiCx$N$y$O$z plasma-enhanced chemical vapor deposition at room temperature | SiCNO PECVD Interaction | O |
| 150 | [Review lecture] Current Status and Future Prospects of Hard Coatings for Cutting Tools by Chemical Vapor Deposition | CVD Cutting tool Hard coating | O |
| 168 | Feed of Gaseous Boron Source Using Solid Boron and Water Vapor and Synthesis of Boron Nitride Nanotubes via Template Coating Method | Boron Nitride Nanotube (BNNT) Template coating method Boron oxide | O |
| 229 | Low temperature CVD process development for AlN thin films for 3DICs. | AlN film chemical vapor deposition low temperature | O |
| 255 | Rate analysis of coke deposition from hydrocarbons with different degrees of unsaturation | coking CVD Carbon | O |
| 304 | Development of low-resistivity copper thin film formation process on polymer by supercritical fluid thin film deposition method | SCFD Polymer resistivity | O |
| 344 | Development of damage-less dry-purification of carbon nanotubes using Br2 vapor | Carbon nanotube Purification Bromine vapor | O |
| 423 | DFT study on reaction paths of AlN growth by MOCVD | DFT AlN MOCVD | O |
| 425 | Morphology Improvement of Chemical Vapor Deposited Bismuth-based Perovskite Thin Film for Photovoltaic Use | Chemical vapor deposition Methylammonium bismuth iodide Molten bismuth | O |
| 518 | [Invited lecture] Development of Epitaxial Growth for High Performance SiC Power Devices | Silicon carbide Power device Epitaxial growth | O |
| 705 | In-situ Quartz Crystal Microbalance Measurement of Adsorption for Trimethylaluminum | ALD QCM Adsorption | O |
| 778 | Photocatalytic Performance Evaluation of TiO2$ and TiO$2-CuO Nanoparticulate Thin Films Prepared by a Gas Phase System | PECVD PVD TiO2-CuO heterojunction | O |
| 783 | [Invited lecture] Structure and morphology control in thin films by using sputtering | sputtering thin film morphology control | O |
| 814 | [Review lecture] R&D Trend and Future Prospect of 3D LSI Chip Stacking Technology | 3D-IC chip stacking TSV | O |
| 824 | Improvement of COSMO-SAC method for estimating vapor pressure of metal complex | COSMO-SAC metal complex vapor pressure | O |
| 837 | Examination of selective deposition process by Co-ALD | cobalt ALD selective deposition | O |
| 843 | Investigation of high-speed impregnation conditions using high-concentration hydrogen supply in SiC-CVI process | SiC CVI CVD | O |
| 845 | Development of Molybdenum Atomic Layer Deposition Process for Next Generation ULSI Interconnect | ALD Molybdenum interconnect | O |
| 862 | Detailed study of the effect of SiCl4$ addition to SiC-CVI by MTS/H$2 | SiC CVI MTS | O |
| 876 | Evaluation of the Physical Properties of Reactive sputtered MAX alloy thin films | sputtering MAX-phase | O |
| 895 | Observation of the initial process of Cobalt film growth using variations in reflected light intensity. | cobalt ALD reflectance | O |
| 926 | Investigation of visible light responsive CuOx$/TiO$2 photocatalytic reaction mechanism using model catalyst structure | photocatalyst visible light reaction mechanism | O |
easp 2.51b; update.pl 2.37 (C)1999-2015 kawase
