G119 - Hall G, Day 1 - Hall and day program - SCEJ 57th Autumn Meeting (Higashihiroshima, 2026)

`SCEJ 57th Autumn Meeting (Higashihiroshima, 2026)`

Last modified: 2026-07-16 06:38:20

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Hall and day program : Hall G, Day 1 : G119

The chairs are under negotiation.
Yellow-backs on Technical sessions denote the Hybrid sessions.
(All other sessions are on-site only sessions).

Hall G(K2F K210), Day 1(Sep. 14)

ST-27

Time	Paper ID	Title / Authors	Keywords	Topic code	Ack. number
ST-27 [Trans-Division Symposium] CVD/ALD & Dry Process, Control of Structure and unction of material by reaction engineering
(13:20–16:00)
13:20– 14:00	G114	[Review lecture] What is the “cutting edge of semiconductor devices”? Considering this from the history of 3D device (Hiroshima U.) Aoto Nahomi	Semiconductor Logic Memory	ST-27	347
14:00– 14:20	G116	Control of a High-Speed Switching Valve for On-Demand Precursor Delivery in ALD II : Analysis of Flow Rate Response (Kumamoto U.) *(Stu)Ishida Kanta, Nishizato Hiroshi, (Stu)Oda Shota, Nakaya Yugo, Nasu Kinichi, (Reg)Hirayama Mikiro, Okajima Hiroshi, (Reg)Momose Takeshi	Atomic Layer Deposition Sustainable Valve	ST-27	679
14:20– 14:40	G117	Study on Low-Temperature AlN Deposition and Enhancement of Thermal Conductivity via TMA/NH₃-Based FM-CVD (2) Effect of Grain Size (U. Tokyo) *(Stu)Hatakeyama Daiki, (Reg)Otaka Yuhei, (Reg)Sato Noboru, (Reg)Tamaoki Naoki, (Reg)Yamaguchi Jun, (Reg)Tsukune Atsuhiro, (Reg)Shimogaki Yukihiro	AlN CVD 3DIC	ST-27	828
14:40– 15:00		Break
15:00– 15:20	G119	Fabrication and Evaluation of B- and Mo-Doped TiCN Films by DC Plasma CVD (Osaka Metro. U.) *(Stu)Kurogi Rizu, (Reg)Saito Takeyasu, (Reg)Okamoto Naoki, Kawamoto Mika	DC plasma CVD TiSiCN	ST-27	943
15:20– 15:40	G120	[Invited lecture] Introduction of a case study of optimizing the thin-film deposition process using AI tools developed by TEL (Tokyo Electron Tech. Solutions) Itoh Satoshi	AI tools ALD/CVD Process informatics	ST-27	211
15:40– 16:00	G121	[Invited lecture] From Property Measurement to AI-Based Property Prediction: New Developments in Thermodynamic Research (Saitama U.) (Reg)Matsukawa Hiroaki	Thermodynamic Properties Machine Learning Phase Equilibria	ST-27	97

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SCEJ 57th Autumn Meeting (Higashihiroshima, 2026)

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