SY-76 - Session programs - SCEJ 57th Autumn Meeting (Higashihiroshima, 2026)

`SCEJ 57th Autumn Meeting (Higashihiroshima, 2026)`

Last modified: 2026-07-16 06:38:20

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Session programs : SY-76

The chairs are under negotiation.
Yellow-backs on Technical sessions denote the Hybrid sessions.
(All other sessions are on-site only sessions).

SY-76 [Symposium of Division of Electronics]
Electronics Materials and Processes

Organizers:

Saito Takeyasu (Osaka Metro. Univ.), Habuka Hitoshi (Yokohama Nat. Univ.), Iwamoto Takeshi (Mitsubishi Electric), Okamoto Naoki (Osaka Metro. Univ.)

This symposium widely accepts papers of the electronic materials and process technologies, containing electroplating, batteries, semiconductor crystals, polymers and any relating issues.

Hall S, Day 2

Time	Paper ID	Title / Authors	Keywords	Topic code	Ack. number
Hall S(103), Day 2(Sep. 15)
(13:00–14:20)
13:00– 13:40	S213	[Review lecture] The Current Status and Future Prospects of EUVL (U. Hyogo) Watanabe Takeo	EUV Lithography Element technologies of EUVL Next Generation EUVL	SY-76	698
13:40– 14:00	S215	[Invited lecture] Challenges in Wafer Drying Processes and Trends in Pattern Collapse Reduction (Screen Holdings) Nakano Yuui	Pattern collapse Wafer drying	SY-76	637
14:00– 14:20	S216	Cu reduction and OH incorporation to Si insulator by VUV irradiation (Osaka Metro. U.) *(Reg)Saito Takeyasu, Katayama Kaito, Akamatsu Hosei, Endo Shinichi, (Reg)Okamoto Naoki	VUV surface treatment hybrid bonding	SY-76	926
(14:20–15:40)
14:20– 15:00	S217	[Review lecture] Research and development of SiC CMOS integrated circuits and image sensors for extreme environments (Hiroshima U.) Kuroki Shin-Ichiro	SiC CMOS Integrated circuits	SY-76	80
15:00– 15:20	S219	[Invited lecture] Challenges and Recent Advances for the Practical Application of Sulfide All-Solid-State Batteries (AIST) Otoyama Misae	Sulfide All-Solid-State Batteries Solid Electrolytes	SY-76	46
15:20– 15:40	S220	Gas process monitor utilizing quartz crystal microbalance (Yokohama Nat. U.) (Reg)Habuka Hitoshi	quartz crystal microbalance gas process	SY-76	906

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SCEJ 57th Autumn Meeting (Higashihiroshima, 2026)

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SCEJ 57th Autumn Meeting (Higashihiroshima, 2026)

Session programs : SY-76

SY-76 [Symposium of Division of Electronics] Electronics Materials and Processes

`SCEJ 57th Autumn Meeting (Higashihiroshima, 2026)`

SY-76 [Symposium of Division of Electronics]
Electronics Materials and Processes