ST-27 - Session programs - SCEJ 57th Autumn Meeting (Higashihiroshima, 2026)

`SCEJ 57th Autumn Meeting (Higashihiroshima, 2026)`

Last modified: 2026-07-16 06:38:20

Meeting Info.
Program
- Program Menu
- Tech. Sessions
- narrow view
- Prev.Day
- Day 1
- Day 2
- Day 3
By Session
- Session list
- Ceremony
  - Ceremony
- SP: Special
  - SP-1
  - SP-2
  - SP-3
- HQ: HQ Prog.
  - HQ-11
  - HQ-12
  - HQ-13
  - HQ-14
- ST: Trans-Div.
  - ST-21
  - ST-22
  - ST-23
  - ST-24
  - ST-25
  - ST-26
  - ST-27
  - ST-28
  - ST-29
  - ST-30
- SY: 51-59
  - SY-51
  - SY-52
  - SY-53
  - SY-54
  - SY-55
  - SY-56
  - SY-57
  - SY-58
  - SY-59
- SY: 60-69
  - SY-60
  - SY-61
  - SY-62
  - SY-63
  - SY-64
  - SY-65
  - SY-66
  - SY-67
  - SY-68
  - SY-69
- SY: 70-79
  - SY-70
  - SY-71
  - SY-72
  - SY-73
  - SY-74
  - SY-75
  - SY-76
  - SY-77
  - SY-78
  - SY-79
- SY: 80-82
  - SY-80
  - SY-81
  - SY-82
By Hall
- Hall list
- A-L: Bldg. K
  - A: 1F K108
  - B: 1F K107
  - C: 1F K109
  - D: 1F K103
  - E: 1F K110
  - F: 2F K203
  - G: 2F K210
  - H: 2F K211
  - I: 3F K313
  - J: 3F K305
  - K: 3F K314
  - L: 3F K306
- M,N: Bldg. L
  - M: 1F L101
  - N: 2F L201
- P: Fac.Club
- R-Y: Fac.of Eng.
  - R: 102
  - S: 103
  - T: 218
  - U: 107
  - V: 219
  - W: 111
  - X: 220
  - Y: 116
List/Index
Search/Index

Session programs : ST-27

The chairs are under negotiation.
Yellow-backs on Technical sessions denote the Hybrid sessions.
(All other sessions are on-site only sessions).

ST-27 [Trans-Division Symposium]
CVD/ALD & Dry Process, Control of Structure and unction of material by reaction engineering

Organizers:

Miyake Masato (Ritsumeikan Univ.), Nagasawa Hiroki (Hiroshima Univ.), Fujiwara Kakeru (Saitama Univ.)

Hall G, Day 1 | Hall G, Day 2

Time	Paper ID	Title / Authors	Keywords	Topic code	Ack. number
Hall G(K2F K210), Day 1(Sep. 14)
(13:20–16:00)
13:20– 14:00	G114	[Review lecture] What is the “cutting edge of semiconductor devices”? Considering this from the history of 3D device (Hiroshima U.) Aoto Nahomi	Semiconductor Logic Memory	ST-27	347
14:00– 14:20	G116	Control of a High-Speed Switching Valve for On-Demand Precursor Delivery in ALD II : Analysis of Flow Rate Response (Kumamoto U.) *(Stu)Ishida Kanta, Nishizato Hiroshi, (Stu)Oda Shota, Nakaya Yugo, Nasu Kinichi, (Reg)Hirayama Mikiro, Okajima Hiroshi, (Reg)Momose Takeshi	Atomic Layer Deposition Sustainable Valve	ST-27	679
14:20– 14:40	G117	Study on Low-Temperature AlN Deposition and Enhancement of Thermal Conductivity via TMA/NH₃-Based FM-CVD (2) Effect of Grain Size (U. Tokyo) *(Stu)Hatakeyama Daiki, (Reg)Otaka Yuhei, (Reg)Sato Noboru, (Reg)Tamaoki Naoki, (Reg)Yamaguchi Jun, (Reg)Tsukune Atsuhiro, (Reg)Shimogaki Yukihiro	AlN CVD 3DIC	ST-27	828
14:40– 15:00		Break
15:00– 15:20	G119	Fabrication and Evaluation of B- and Mo-Doped TiCN Films by DC Plasma CVD (Osaka Metro. U.) *(Stu)Kurogi Rizu, (Reg)Saito Takeyasu, (Reg)Okamoto Naoki, Kawamoto Mika	DC plasma CVD TiSiCN	ST-27	943
15:20– 15:40	G120	[Invited lecture] Introduction of a case study of optimizing the thin-film deposition process using AI tools developed by TEL (Tokyo Electron Tech. Solutions) Itoh Satoshi	AI tools ALD/CVD Process informatics	ST-27	211
15:40– 16:00	G121	[Invited lecture] From Property Measurement to AI-Based Property Prediction: New Developments in Thermodynamic Research (Saitama U.) (Reg)Matsukawa Hiroaki	Thermodynamic Properties Machine Learning Phase Equilibria	ST-27	97
Hall G(K2F K210), Day 2(Sep. 15)
(13:00–15:40)
13:00– 13:40	G213	[Review lecture] Gas-Phase Nanostructuring of Fine Particles and Its Applications in Functional Materials (Hiroshima U.) (Reg)Ogi Takashi	Spray process Nanostructured particle	ST-27	31
13:40– 14:00	G215	High-Throughput Synthesis of Catalysts Using Flame Synthesis (Saitama U.) *(Reg)Fujiwara Kakeru, (Kanazawa U.) Aoyama Koudai, (Reg)Osaka Yugo, (Reg)Tsujiguchi Takuya, (Reg)Kodama Akio	Flame spray pyrolysis High-Throughput Synthesis CO2 methanation	ST-27	346
14:00– 14:20	G216	Structural Control of ZnO Nanorods for Application to Perovskite Solar Cells (UTokyo) *Wang Yuhui, (Reg)Tsuji Yoshiko	ZnO nanorods Hydrothermal growth Perovskite solar cells	ST-27	528
14:20– 14:40	G217	Synthesis of ZnO-TiO₂-CNT Nanocomposites by the in-flight PECVD Method and Their Functional Evaluation (Hiroshima U.) *(Stu·PCEF)Masuda Rena, (PCEF)Kawamoto Takehito, (Reg)Kubo Masaru, (Reg)Shimada Manabu	nanoparticle coating aerosol process gas sensor	ST-27	545
14:40– 15:00	G218	Effects of catalyst precursor heating and gas mixing on gas-phase synthesis of carbon nanotubes (Waseda U.) *(Stu)Ando Koyo, Negishi Nonoka, Naotsuka Yuki, (Reg)Osawa Toshio, (Reg)Noda Suguru	carbon nanotube floating catalyst chemical vapor deposition computational fluid dynamics	ST-27	331
15:00– 15:20	G219	Influence of CeO₂ as a promoter on Ni-Mo₂C/MgO catalyst for production of syngas and CNTs (Kyoto U.) *(Int)Saconsint Supanida, (Reg)Sano Noriaki, (Reg)Suzuki Tetsuo	carbon nanotube carbon dioxide catalyst	ST-27	762
15:20– 15:40	G220	Development of a Direct Co-regeneration Method for LMO-NCM Mixed Cathodes in Lithium-Ion Batteries (Waseda U.) *(Stu)Kitajima Daiki, (Reg)Mae Tomotaro, (Reg)Noda Suguru	Direct recycling Mixed cathode lithium-ion battery	ST-27	165

Technical program
Technical sessions (Wide) (For narrow screen)
Session programs
Search in technical program
SCEJ 57th Autumn Meeting (Higashihiroshima, 2026)

www4.scej.org

SCEJ 57th Autumn Meeting (Higashihiroshima, 2026)

Session programs : ST-27

ST-27 [Trans-Division Symposium] CVD/ALD & Dry Process, Control of Structure and unction of material by reaction engineering

`SCEJ 57th Autumn Meeting (Higashihiroshima, 2026)`

ST-27 [Trans-Division Symposium]
CVD/ALD & Dry Process, Control of Structure and unction of material by reaction engineering