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SCEJ 52nd Autumn Meeting (Okayama, 2021)

Program search result : ダイキン工業 : 2 programs

ST-25,SY-56,SY-64,SY-65,SY-70 are changed from live streaming sessions to online sessions.
The preprints are now open (Sep. 8). These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants (excludes free registration) and invited persons are required.

Affillations (J) field begins with “ダイキン工業”; 2 programs are found. (“Poster with Flash” presentations are double-counted.)
The search results are sorted by the start time.

TimePaper
ID		Title / AuthorsKeywordsTopic codeAck.
number
Day 1
13:00– 13:40		VF113[Review lecture] Technological and product development with a bird's-eye view of basic physical properties
(Daikin Industries) *(Reg)Ota Toshihiko, (Cor)Ohhigasi Yuuko
fundamental properties
physical property estimation
SY-51289
Day 1
14:00– 14:20		VC116Examination of precursor vaporization characteristics in pulse-supply ALD
(U. Tokyo) *(Stu)Yamaguchi Jun, (Reg)Deura Momoko, (Reg)Momose Takeshi, (Daikin Industries) (Cor)Matsunaga Takayuki, (Cor)Yamauchi Akiyoshi, (Cor)Kishikawa Yousuke, (U. Tokyo) (Reg)Shimogaki Yukihiro
ALD
precursor
vaporization
ST-22594

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SCEJ 52nd Autumn Meeting (Okayama, 2021)

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