
Authors and Chairs (J) field exact matches “佐用 拓海”; 1 program is found.
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| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 2 | PA223 | Investigation of core material removal to control hollow structure of hollow microcapsules and its application to novel CMP pads. | Microcapsule Hollow core Chemical mechanical polishing | SY-79 | 846 |
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SCEJ 54th Autumn Meeting (Fukuoka, 2023)
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