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SCEJ 54th Autumn Meeting (Fukuoka, 2023)

Program search result : 佐用 拓海 : 1 program

The preprints(abstracts) are now open (Aug. 28). These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants and invited persons are required.

Authors and Chairs (J) field exact matches “佐用 拓海”; 1 program is found.
The search results are sorted by the start time.

TimePaper
ID
Title / AuthorsKeywordsTopic codeAck.
number
Day 2
9:3011:00
PA223Investigation of core material removal to control hollow structure of hollow microcapsules and its application to novel CMP pads.
(Kagoshima U.) *(Stu·PCEF)Goto Keita, (Stu·PCEF)Sayo Takumi, (Tokuyama) (Cor)Marumoto Hayato, (Cor)Kawasaki Takayoshi, (Kagoshima U.) (Reg)Ohzuno Yoshihiro, (Reg)Takei Takayuki, (Reg)Takase Hayato, (Reg)Yoshida Masahiro
Microcapsule
Hollow core
Chemical mechanical polishing
SY-79846

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SCEJ 54th Autumn Meeting (Fukuoka, 2023)


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