SCEJ 54th Autumn Meeting (Fukuoka, 2023)
Program search result : 佐藤 登 : 7 programs
The preprints(abstracts) are now open (Aug. 28). These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants and invited persons are required.
Authors and Chairs (J) field exact matches “佐藤 登”; 7 programs are found. (“Poster with Flash” presentations are double-counted.)
The search results are sorted by the start time.
| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 1 | S116 | Development of Molybdenum Atomic Layer Deposition Process for Next Generation ULSI Interconnect | ALD Molybdenum interconnect | ST-24 | 845 |
| Day 1 | S117 | Examination of selective deposition process by Co-ALD | cobalt ALD selective deposition | ST-24 | 837 |
| Day 1 | S124 | In-situ Quartz Crystal Microbalance Measurement of Adsorption for Trimethylaluminum | ALD QCM Adsorption | ST-24 | 705 |
| Day 2 | S201 | Observation of the initial process of Cobalt film growth using variations in reflected light intensity. | cobalt ALD reflectance | ST-24 | 895 |
| Day 2 | S206 | Detailed study of the effect of SiCl4 addition to SiC-CVI by MTS/H2 | SiC CVI MTS | ST-24 | 862 |
| Day 2 | S207 | Investigation of high-speed impregnation conditions using high-concentration hydrogen supply in SiC-CVI process | SiC CVI CVD | ST-24 | 843 |
| Day 2 | S216 | Improvement of COSMO-SAC method for estimating vapor pressure of metal complex | COSMO-SAC metal complex vapor pressure | ST-24 | 824 |
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SCEJ 54th Autumn Meeting (Fukuoka, 2023)
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