Authors field exact matches “Nishida Satoshi”; 2 programs are found. (“Poster with Flash” presentations are double-counted.)
The search results are sorted by the start time.
Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
---|---|---|---|---|---|
Day 1 | Chair: | ||||
S114 | [Review lecture] R&D Trend and Future Prospect of 3D LSI Chip Stacking Technology | 3D-IC chip stacking TSV | ST-24 | 814 | |
S116 | Development of Molybdenum Atomic Layer Deposition Process for Next Generation ULSI Interconnect | ALD Molybdenum interconnect | ST-24 | 845 | |
S117 | Examination of selective deposition process by Co-ALD | cobalt ALD selective deposition | ST-24 | 837 | |
Day 2 | Chair: | ||||
S217 | Photocatalytic Performance Evaluation of TiO2 and TiO2-CuO Nanoparticulate Thin Films Prepared by a Gas Phase System | PECVD PVD TiO2-CuO heterojunction | ST-24 | 778 | |
S218 | Investigation of visible light responsive CuOx/TiO2 photocatalytic reaction mechanism using model catalyst structure | photocatalyst visible light reaction mechanism | ST-24 | 926 | |
S219 | Evaluation of the Physical Properties of Reactive sputtered MAX alloy thin films | sputtering MAX-phase | ST-24 | 876 | |
S220 | [Invited lecture] Structure and morphology control in thin films by using sputtering | sputtering thin film morphology control | ST-24 | 783 |
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SCEJ 54th Autumn Meeting (Fukuoka, 2023)