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SCEJ 54th Autumn Meeting (Fukuoka, 2023)
Program search result : Yamaguchi Jun : 4 programs
The preprints(abstracts) are now open (Aug. 28). These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants and invited persons are required.
Authors field exact matches “Yamaguchi Jun”; 4 programs are found. (“Poster with Flash” presentations are double-counted.)
The search results are sorted by the start time.
| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 1 | S116 | Development of Molybdenum Atomic Layer Deposition Process for Next Generation ULSI Interconnect | ALD Molybdenum interconnect | ST-24 | 845 |
| Day 1 | S117 | Examination of selective deposition process by Co-ALD | cobalt ALD selective deposition | ST-24 | 837 |
| Day 1 | S124 | In-situ Quartz Crystal Microbalance Measurement of Adsorption for Trimethylaluminum | ALD QCM Adsorption | ST-24 | 705 |
| Day 2 | S201 | Observation of the initial process of Cobalt film growth using variations in reflected light intensity. | cobalt ALD reflectance | ST-24 | 895 |
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SCEJ 54th Autumn Meeting (Fukuoka, 2023)
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