Dry processes such as CVD and ALD have become important core technologies in various fields such as electronics, energy devices, and functional coatings. Especially in recent years, the importance of the semiconductor industry, which is also called the rice of industry, has been reaffirmed, and the construction and control of processes based on an understanding of the mechanism is increasingly required. In this symposium, the reaction mechanisms of thin film formation, fine particle synthesis, and microfabrication using dry processes will be understood from the viewpoint of reaction engineering, and rational and efficient reaction processes and reaction devices will be discussed.