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List of received applications (By symposium/topics code)

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SY) SCEJ Division Symposium

SY-76. [Symposium of Division of Electronics] Electronics Materials and Processes

Organizer(s): Saito Takeyasu (Osaka Metro. Univ.), Habuka Hitoshi (Yokohama Nat. Univ.), Iwamoto Takeshi (Mitsubishi Electric), Okamoto Naoki (Osaka Metro. Univ.)

This symposium widely accepts papers of the electronic materials and process technologies, containing electroplating, batteries, semiconductor crystals, polymers and any relating issues.

Most recent update: 2026-06-27 22:03:02

The keywords that frequently used
in this topics code.
KeywordsNumber
surface treatment1
Element technologies of EUVL1
CMOS1
SiC1
EUV Lithography1
Pattern collapse1
Next Generation EUVL1
quartz crystal microbalance1
Sulfide All-Solid-State Batteries1
Integrated circuits1
gas process1
VUV1
hybrid bonding1
Wafer drying1
Solid Electrolytes1

ACKN
No.
Title/Author(s)KeywordsStyle
46[Invited lecture] Challenges and Recent Advances for the Practical Application of Sulfide All-Solid-State Batteries
(AIST) Otoyama Misae
Sulfide All-Solid-State Batteries
Solid Electrolytes
O
80[Review lecture] Research and development of SiC CMOS integrated circuits and image sensors for extreme environments
(Hiroshima U.) Kuroki Shin-Ichiro
SiC
CMOS
Integrated circuits
O
637[Invited lecture] Challenges in Wafer Drying Processes and Trends in Pattern Collapse Reduction
(Screen Holdings) Nakano Yuui
Pattern collapse
Wafer drying
O
698[Review lecture] The Current Status and Future Prospects of EUVL
(U. Hyogo) Watanabe Takeo
EUV Lithography
Element technologies of EUVL
Next Generation EUVL
O
906Gas process monitor utilizing quartz crystal microbalance
(Yokohama Nat. U.) (Reg)Habuka Hitoshi
quartz crystal microbalance
gas process
O
926Cu reduction and OH incorporation to Si insulator by VUV irradiation
(Osaka Metro. U.) *(Reg)Saito Takeyasu, Katayama Kaito, Akamatsu Hosei, Endo Shinichi, (Reg)Okamoto Naoki
VUV
surface treatment
hybrid bonding
O

List of received applications (By topics code)

List of received applications
SCEJ 57th Autumn Meeting (Higashihiroshima, 2026)

Organizing Committee of SCEJ 57th Annual Meeting (2026)
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