
SCEJ 57th Autumn Meeting
Sep. 14 (Mon) - 16 (Wed), 2026
Higashi-hiroshima Campus, Hiroshima University
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This symposium widely accepts papers of the electronic materials and process technologies, containing electroplating, batteries, semiconductor crystals, polymers and any relating issues.
Most recent update: 2026-06-27 21:03:02
The keywords that frequently used in this topics code. | Keywords | Number | |
|---|---|---|---|
| CMOS | 1 | ||
| Next Generation EUVL | 1 | ||
| SiC | 1 | ||
| Sulfide All-Solid-State Batteries | 1 | ||
| quartz crystal microbalance | 1 | ||
| surface treatment | 1 | ||
| Solid Electrolytes | 1 | ||
| EUV Lithography | 1 | ||
| gas process | 1 | ||
| VUV | 1 | ||
| Wafer drying | 1 | ||
| hybrid bonding | 1 | ||
| Element technologies of EUVL | 1 | ||
| Pattern collapse | 1 | ||
| Integrated circuits | 1 | ||
| ACKN No. | Title/Author(s) | Keywords | Style |
|---|---|---|---|
| 46 | [Invited lecture] Challenges and Recent Advances for the Practical Application of Sulfide All-Solid-State Batteries | Sulfide All-Solid-State Batteries Solid Electrolytes | O |
| 80 | [Review lecture] Research and development of SiC CMOS integrated circuits and image sensors for extreme environments | SiC CMOS Integrated circuits | O |
| 637 | [Invited lecture] Challenges in Wafer Drying Processes and Trends in Pattern Collapse Reduction | Pattern collapse Wafer drying | O |
| 698 | [Review lecture] The Current Status and Future Prospects of EUVL | EUV Lithography Element technologies of EUVL Next Generation EUVL | O |
| 906 | Gas process monitor utilizing quartz crystal microbalance | quartz crystal microbalance gas process | O |
| 926 | Cu reduction and OH incorporation to Si insulator by VUV irradiation | VUV surface treatment hybrid bonding | O |
Organizing Committee of SCEJ 57th Annual Meeting (2026)
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