Habuka Hitoshi - Program search result - SCEJ 54th Autumn Meeting (Fukuoka, 2023)

`SCEJ 54th Autumn Meeting (Fukuoka, 2023)`

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Program search result : Habuka Hitoshi : 4 programs

The preprints(abstracts) are now open (Aug. 28). These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants and invited persons are required.

Authors field exact matches “Habuka Hitoshi”; 4 programs are found. (“Poster with Flash” presentations are double-counted.)
The search results are sorted by the start time.

Time	Paper ID	Title / Authors	Keywords	Topic code	Ack. number
Day 1 15:00– 15:20	S119	Precursor interactions for SiC_xN_yO_z plasma-enhanced chemical vapor deposition at room temperature (Yokohama Nat. U.) Kawakami Hiroki, Hori Kenta, Watanabe Toru, *(Reg)Habuka Hitoshi	SiCNO PECVD Interaction	ST-24	94
Day 1 15:00– 17:00	Chair: Shimada Manabu, Habuka Hitoshi
	S119	Precursor interactions for SiC_xN_yO_z plasma-enhanced chemical vapor deposition at room temperature (Yokohama Nat. U.) Kawakami Hiroki, Hori Kenta, Watanabe Toru, *(Reg)Habuka Hitoshi	SiCNO PECVD Interaction	ST-24	94
	S120	Low temperature CVD process development for AlN thin films for 3DICs. (U. Tokyo) *(Stu)Obara S., Ninomiya T., Takagi T., (Reg)Momose T., (Reg)Shimogaki Y.	AlN film chemical vapor deposition low temperature	ST-24	229
	S121	Feed of Gaseous Boron Source Using Solid Boron and Water Vapor and Synthesis of Boron Nitride Nanotubes via Template Coating Method (Waseda U.) *(Stu·PCEF)Kaida Takazumi, Takahashi Hiromu, (Reg)Li Mochen, (Reg)Osawa Toshio, (Reg)Noda Suguru	Boron Nitride Nanotube (BNNT) Template coating method Boron oxide	ST-24	168
	S122	Development of low-resistivity copper thin film formation process on polymer by supercritical fluid thin film deposition method (U. Tokyo) *(Stu)Nakajima Yusuke, (Reg)Shimogaki Yukihiro, (U. Tokyo/Kumamoto U) (Reg)Momose Takeshi	SCFD Polymer resistivity	ST-24	304
	S123	Development of damage-less dry-purification of carbon nanotubes using Br₂ vapor (Waseda U.) *(Stu·PCEF)Goto Takuma, (Reg)Osawa Toshio, (Reg)Noda Suguru	Carbon nanotube Purification Bromine vapor	ST-24	344
	S124	In-situ Quartz Crystal Microbalance Measurement of Adsorption for Trimethylaluminum (U. Tokyo) *(Stu)Wu Yuxuan, (Stu)Liu Haonan, (Reg)Yamaguchi Jun, (Reg)Sato Noboru, (Reg)Tsukune Atsuhiro, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro	ALD QCM Adsorption	ST-24	705
Day 2 9:40– 10:00	C203	Influence of wafer load/unload operation in batch-type wafer cleaning (Yokohama Nat. U.) Tsuchida Toko, *(Reg)Habuka Hitoshi, (PreTech) Goto Akihiro	Wafer cleaning Wafer operation Betch-type cleaner	SY-77	95
Day 2 13:40– 15:40	Chair: Habuka Hitoshi
	C215	[Review lecture] Haptics technology Development to create excitement (Sony) Nakagawa Yusuke	Haptics technology	SY-77	224
	C217	[Invited lecture] Current Status and Potential of Perovskite Solar Cells (AIST) Kogo Atsushi	Perovskite Solar Cells	SY-77	113
	C218	Consideration of Electrochemical Reaction for Graphene Dispersed in Alkaline Aqueous Solution (Osaka Metro. U.) *(Reg)Okamoto Naoki, Miyake Rei, (Reg)Saito Takeyasu	Graphene Electrochemical Reaction	SY-77	835
	C219	Investigation of electrochemical Cu doping to ZnS prepared by electrodeposition method (Osaka Metro. U.) *(Reg)Okamoto Naoki, Matsuda Naohiro, (Reg)Saito Takeyasu	electrodeposition ZnS Cu	SY-77	848
	C220	Investigation of defect reduction of Ni electroforming in the mold manufacturing process (Osaka Metro. U.) *(Stu)Mizobata Ryo, (Reg)Okamoto Naoki, (Reg)Saito Takeyasu, (Parity Innovations) Maeda Yuki, Maekawa Satoshi	electroforming Ni mold manufacturing process	SY-77	867

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SCEJ 54th Autumn Meeting (Fukuoka, 2023)

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