Keywords field exact matches “SCFD”; 1 program is found.
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Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
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Day 1 | S122 | Development of low-resistivity copper thin film formation process on polymer by supercritical fluid thin film deposition method | SCFD Polymer resistivity | ST-24 | 304 |
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SCEJ 54th Autumn Meeting (Fukuoka, 2023)