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SCEJ 54th Autumn Meeting (Fukuoka, 2023)
Program search result : 超臨界流体薄膜堆積法 : 1 program
The preprints(abstracts) are now open (Aug. 28). These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants and invited persons are required.
Title (J) field includes “超臨界流体薄膜堆積法”; 1 program is found.
The search results are sorted by the start time.
| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 1 | S122 | Development of low-resistivity copper thin film formation process on polymer by supercritical fluid thin film deposition method | SCFD Polymer resistivity | ST-24 | 304 |
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SCEJ 54th Autumn Meeting (Fukuoka, 2023)
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