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5) Chemical reaction engineering

5-h. CVD & dry processes

Most recent update: 2025-12-31 20:29:01

The keywords that frequently used
in this topics code.		KeywordsNumber
Supercritical Fluid Deposition5*
SiC2
Atomic Layer Deposition2
Copper Deposition2
Process informatics2
Chemical Vapor Deposition2
CVD2
Area selective deposition1

ACKN
No.		Title/Author(s)KeywordsStyle
88Development of solution-based Fe/MgO catalyst for the synthesis of submillimeter-long carbon nanotubes
(Waseda U.) *(Stu)Matsukawa Yoshiyuki, (Reg)Mae Tomotaro, (Reg)Osawa Toshio, (Panasonic Energy) Kato Masaki, (Waseda U.) (Reg)Noda Suguru		Carbon nanotubes
Chemical vapor deposition
Fe/MgO catalyst
P
115Separate heating of catalyst and carbon sources in gas-phase synthesis of carbon nanotubes
(Waseda U.) *(Stu)Ando Koyo, (Reg)Osawa Toshio, (Reg)Noda Suguru		carbon nanotube
floating catalyst chemical vapor deposition
computational fluid dynamics
P
134Control Techniques of selectivity using Hydrazine for SiN-ALD
(Kumamoto U./Taiyo Nippon Sanso) *(Stu)Murata Hayato, (Taiyo Nippon Sanso) (Cor)Wada Yoshifumi, (Reg)Shimizu Hideharu, (Kumamoto U.) (Reg)Momose Takeshi		Atomic layer deposition
Area selective deposition
Hydrazine
O
202Kinetic analysis of CO2-driven ZnO formation using in-situ Raman spectroscopy
(Science Tokyo) *(Reg)Orita Yasuhiko, (Stu)Muronosono Aoi, (Reg)Shimoyama Yusuke		In-situ Raman spectroscopy
High-pressure CO2
ZnO formation
O
528Control of a High-Speed Switching Valve for On-Demand Precursor Delivery in ALD
(Kumamoto U.) *(Stu)Ishida Kanta, (Kumamoto U./HORIBA STEC) Nishizato Hiroshi, (Kumamoto U.) (Stu)Oda Shota, (HORIBA STEC) Nakaya Yugo, (Kumamoto U.) Nasu Kinichi, Okajima Hiroshi, (Reg)Momose Takeshi		Atomic Layer Deposition
Sustainable
Valve
O
592Process Informatics Framework for Optimal Control in Supercritical Fluid Deposition(1)
(Kumamoto U.) *(Stu)Sanai Seitaro, (Stu)Oda Shota, Hashishin Takeshi, Akai Ichiro, (Reg)Momose Takeshi		Process informatics
Physsics-informed Bayesian Optimization
Supercritical fluid deposition
O
603Process Informatics Framework for Optimal Control in Supercritical Fluid Deposition(2)
(Kumamoto U.) *(Stu)Oda Shota, (Stu)Sanai Seitaro, Hashishin Takeshi, Akai Ichiro, (Reg)Momose Takeshi		Process informatics
Physics-informed bayesian optimization
Supercritical fluid deposition
O
604Investigation of Rapid and Conformal Conditions for Cu Film Formation using Supercritical Fluid Deposition on High-Aspect-Ratio Structures
(Kumamoto U.) *(Stu)Nakamura Arisa, (Stu)Kondo Sumiya, (Stu)Oda Shota, Nishi Yuta, Yokoyama Akira, (Reg)Momose Takeshi		Supercritical Fluid Deposition
Copper Deposition
High growth rate
O
639Surface reaction mechanism analysis of SiC chemical vapor deposition using Neural Network Potentials
(U. Tokyo) *(Stu)Yoshida Koki, (Reg)Otaka Yuhei, (Reg)Sato Noboru, (Reg)Tamaoki Naoki, (Reg)Tsukune Atsuhiro, (IHI) (Reg)Fukushima Yasuyuki, (U. Tokyo) (Reg)Shimogaki Yukihiro		SiC
Chemical Vapor Deposition
Neural network potential
O
672Validation of reaction models for the SiC-CVD process using Quadrupole Mass Spectrometry
(U. Tokyo) *(Stu)Yoshida Koki, (Reg)Otaka Yuhei, (Reg)Sato Noboru, (Reg)Tamaoki Naoki, (Reg)Tsukune Atsuhiro, (IHI) (Reg)Fukushima Yasuyuki, (U. Tokyo) (Reg)Shimogaki Yukihiro		SiC
CVD
Quadrupole Mass Spectrometry
O
676Investigation of Low-Temperature AlN Deposition and Thermal Conductivity Enhancement by TMA/NH3-Based FM-CVD
(U. Tokyo) *(Reg)Otaka Yuhei, Lu Yin-Chi, (Stu)Hatakeyama Daiki, (Reg)Yamaguchi Jun, (Reg)Tamaoki Naoki, (Reg)Sato Noboru, (Reg)Tsukune Atsuhiro, (Reg)Shimogaki Yukihiro		AlN
CVD
3DIC
O
684Measurement of Surface Reaction Rate Constanst and Adsorption Equilibrium Constants in Supercritical Fluid Deposition of Cu
(Kumamoto U.) *(Stu)Kondo Sumiya, (Stu)Oda Shota, (Kumamoto U./U. Tokyo) Nakamura Arisa, (Kumamoto U.) (Reg)Momose Takeshi		Supercritical Fluid Deposition
Copper Deposition
Langmuir-Hinshelwood reaction kinetics
O
696Supercritical Fluid Deposition (SCFD) Method for Terahertz Wave Device Formation
(Kumamoto U.) *(Stu)Uehara Koki, (Reg)Momose Takeshi		Supercritical Fluid Deposition
Supecritical Fluid Extraction
Copper Deposition on Polymer
O
700Study of the Initial Nucleation Process in Pd-ALD Using Pd(hfac)2
(U. Tokyo) *(Stu)Mori Wataru, (Stu)Nagai Souga, (Reg)Deng Yubin, (Reg)Otaka Yuhei, (Reg)Yamaguchi Jun, (Reg)Sato Noboru, (Reg)Tamaoki Naoki, (Reg)Tsukune Atsuhiro, (Reg)Shimogaki Yukihiro		palladium
ALD
nucleation
P
712Study of a Co ALD Process Using a Novel Co Precursor with Neural Network Potentials
(U. Tokyo) *(Stu)Tanichi Keisuke, (Reg)Sato Noboru, (Reg)Tamaoki Naoki, (Reg)Tsukune Atsuhiro, (Reg)Shimogaki Yukihiro		Co ALD
Newral Network Potential
Reaction Design
P
List of received applications (By topics code)
List of received applications
SCEJ 91st Annual Meeting (Kyoto, 2026)

Organizing Committee of SCEJ 91st Annual Meeting (2026)
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