Last modified: 2023-05-16 07:28:20
Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
---|---|---|---|---|---|
ST-22 [Trans-Division Symposium] CVD and Dry Processes | |||||
(10:40–12:00) (Chair: | |||||
VC106 | [Review lecture] Semiconductor Memories: Technology, Economy, Industry and Future Growth | CVD semiconductor memory industry | ST-22 | 517 | |
VC108 | Deposition and evaluation of Max Compounds as wiring materials for next-generation semiconductors | Max Phase semiconductor | ST-22 | 864 | |
VC109 | Process development of bismuth-based perovskite CVD for solar cells | CVD perovskite methylammonium bismuth iodide | ST-22 | 375 | |
(13:20–14:40) (Chair: | |||||
VC114 | Direct synthesis of organic modified iron oxide nanocrystals using supercritical CO2 as a reaction field | Supercritical carbon dioxide iron oxide nanocrystals organic modification | ST-22 | 629 | |
VC115 | Effect of additives on photocatalysis and crystallinity of TiO2 made by supercritical fluid deposition | supercritical fluid deposition photocatalyst crystallinity | ST-22 | 142 | |
VC116 | Examination of precursor vaporization characteristics in pulse-supply ALD | ALD precursor vaporization | ST-22 | 594 | |
VC117 | Si-B film deposition from boron trichloride and monomethylsilane gases | Chemical vapor deposition Silicon-Boron film Mechanism | ST-22 | 40 | |
Break | |||||
(15:10–17:00) (Chair: | |||||
VC119 | [Invited lecture] Control of physical properties of CNT yarns spun directly from tall and dense CNT arrays and their application to energy and mechanical devices | Carbon nanotube (CNT) arrays Dry Spinning CNT yarns Energy and mechanical devices | ST-22 | 516 | |
VC121 | [Featured presentation] Enhanced CO2-assisted growth of single-wall carbon nanotube arrays with Fe/AlOx catalyst annealed without CO2 | chemical vaper deposition thermal annealing single-wall carbon nanotubes | ST-22 | 672 | |
VC122 | SiC Infiltration Process Including Exhaust Gas Recycling for SiCf/SiC CMC | SiC reuse CVI | ST-22 | 689 | |
VC123 | Development and validation of overall reaction model for polycrystalline SiC-CVD process design | Chemical Vapor Deposition silicon carbide macrocavity method | ST-22 | 792 | |
VC124 | Numerical simulation of the CVI process in a ceramic matrix composites manufacturing reactor | CVI Numerical simulation MTS | ST-22 | 562 |
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SCEJ 52nd Autumn Meeting (Okayama, 2021)