SCEJ 52nd Autumn Meeting (Okayama, 2021)
Last modified: 2023-05-16 07:28:20
Hall and day program : Hall VC, Day 2
ST-25,SY-56,SY-64,SY-65,SY-70 are changed from live streaming sessions to online sessions.
The preprints are now open (Sep. 8). These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants (excludes free registration) and invited persons are required.
Hall VC, Day 2
ST-22
Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
ST-22 [Trans-Division Symposium] CVD and Dry Processes |
(9:00–11:40) (Chair: Saito Takeyasu, Tamaki Naoki) |
9:00– 9:40 | VC201 | [Review lecture] Growth control of nano-particles in reactive plasmas and its applications
(Kyushu U.) Koga Kazunori | CVD nano-particles growth control
| ST-22 | 514 |
9:40– 10:00 | VC203 | One-step fabrication of CuO-loaded TiO2 nanoparticulate thin film for photocatalytic application under visible light irradiation
(Hiroshima U.) *(Stu)Hudandini Meditha, Jiang Dianping, (ITS, Indonesia) Kusdianto K., (Hiroshima U.) (Reg)Kubo Masaru, (Reg)Shimada Manabu | PECVD-PVD nanocomposite heterojunction
| ST-22 | 154 |
10:00– 10:20 | VC204 | Preparation of TiCN thin film with Ti[N(CH3)2]4 by PACVD
(Osaka Pref. U.) *(Stu)Takeuchi Riku, (Reg)Okamoto Naoki, (Reg)Saito Takeyasu | plasma CVD TDMAT TiCN
| ST-22 | 863 |
10:20– 10:50 | Break
| | | |
10:50– 11:20 | VC206 | [Invited lecture] Challenge to simulation of microspace and macrotime structural changes under plasma irradiation
(Nat. I. Fusion Sci.) Ito Atsushi | CVD plasma numerical simulation
| ST-22 | 519 |
11:20– 11:40 | VC208 | Construction of gas-phase elementary reaction mechanism of TiAlN-CVD based on theoretical study
(U. Tokyo) *(Reg)Sato Noboru, (Stu)Yamaguchi Jun, (Kyocera) (Cor)Kubo Hayato, (Cor)Sugiyama Takanori, (U. Tokyo) (Reg)Deura Momoko, (Reg)Momose Takeshi, (Kyocera) (Cor)Tanibuchi Takahito, (U. Tokyo) (Reg)Shimogaki Yukihiro | TiAlN CVD Elementary reaction model
| ST-22 | 785 |
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SCEJ 52nd Autumn Meeting (Okayama, 2021)
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