SCEJ 89th Annual Meeting (Sakai, 2024)
Program search result : 小原 聡顕 : 1 program
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Authors and Chairs (J) field exact matches “小原 聡顕”; 1 program is found.
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| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 3 | G303 | Development of Molybdenum Atomic Layer Deposition Process for Next Generation of ULSI Interconnect | Molybdenum ALD low resistivity | 5-h | 123 |
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SCEJ 89th Annual Meeting (Sakai, 2024)
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