G306 - Hall G, Day 3 - Hall and day program - SCEJ 89th Annual Meeting (Sakai, 2024)

`SCEJ 89th Annual Meeting (Sakai, 2024)`

Last modified: 2024-03-26 15:33:02

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Hall and day program : Hall G, Day 3 : G306

The preprints can be viewed by clicking the Paper IDs.
The ID/PW sent to the Registered participants and invited persons are required.
Preview of the Program book is now available (Mar. 13th).
Downloadable file is also available on GOING VIRTUAL (Mar. 16th).

Hall G(B3 2F 207), Day 3(Mar. 20)

5 | 4

Time	Paper ID	Title / Authors	Keywords	Topic code	Ack. number
5. Chemical reaction engineering
Organized Session (CVD Reactions Section, Division of Chemical Reaction Engineering)
(9:00–10:40) (Chair: Saito Takeyasu)
9:00– 9:20	G301	Quantitative Analysis of Trimethylaluminum Physisorption for ALD (U. Tokyo) *(Stu)Wu Yuxuan, (Reg)Yamaguchi Jun, (Reg)Sato Noboru, (Reg)Tsukune Atsuhiro, (Reg)Shimogaki Yukihiro	Atomic Layer Depositon Quartz Crystal Microbalance Surface Adsorption	5-h	383
9:20– 9:40	G302	Study of ZrN thin film formation process using atomic layer deposition (U. Tokyo) *(Stu)Tanaka Jun, (Reg)Yamaguchi Jun, (Reg)Sato Noboru, (Reg)Tsukune Atsuhiro, (Reg)Shimogaki Yukihiro	ZrN ALD TEMAZ	5-h	273
9:40– 10:00	G303	Development of Molybdenum Atomic Layer Deposition Process for Next Generation of ULSI Interconnect (U. Tokyo) *(Stu)Obara Soken, (Reg)Yamaguchi Jun, (Reg)Sato Noboru, (Reg)Tsukune Atsuhiro, (Reg)Shimogaki Yukihiro	Molybdenum ALD low resistivity	5-h	123
10:00– 10:20	G304	Silicon Nitride ALD Process Using High Purity Hydrazine (Taiyo Nippon Sanso) *(Cor)Wada Yoshifumi, (Cor)Murata Hayato, (Cor)Shimizu Hideharu	Siicon Nitride Atomic Layer Deposition Incubation Cycle	5-h	109
10:20– 10:40	G305	Investigation of Co Thin Film Thermal Atomic Layer Etching Process (U. Tokyo) *(Reg)Yamaguchi Jun, (Reg)Sato Noboru, (Reg)Tsukune Atsuhiro, (Reg)Momose Takeshi, (Reg)Shimogaki Yukihiro	ALE atomic layer eching cobalt	5-h	516
(10:40–12:00) (Chair: Sugime Hisashi, Shimizu Hideharu)
10:40– 11:00	G306	Investigation of Area Selective Co-ALD process utilizing in-situ observation of reflectance intensity. (U. Tokyo) *(Stu)Kimura Shunsuke, (Reg)Yamaguchi Jun, (Reg)Sato Noboru, (Reg)Momose Takeshi, (Reg)Tsukune Atsuhiro, (Reg)Shimogaki Yukihiro	ALD in-situ observation reflectance	5-h	232
11:00– 11:20	G307	Investigation of Continuous Cu Film Formation Process on Polymer (U.Tokyo) *(Stu)Nakajima Yusuke, (Reg)Yamaguchi Jun, (Reg)Sato Noboru, (Reg)Tsukune Atsuhiro, (Reg)Shimogaki Yukihiro	Atomic Layer Depoition Copper on Polymer	5-h	531
11:20– 11:40	G308	Surface activation of the copper surface by VUV-Redox method using xenon excimer lamp (Osaka Metro. U.) *(Reg)Endo Shinichi, (Reg)Saito Takeyasu	VUV-Redo Surface activation	5-h	786
11:40– 12:00	G309	CFD Simulation Study on factors influencing AlN compound single crystal growth (Kyoto U.) *(Stu)Li Yafei, Murahashi Kousuke, (Reg)Kawase Motoaki	MOCVD CFD III-V compound	5-h	683
12:00– 12:20		CVD reaction subdivision encouragement award ceremony
4. Separation processes
(13:00–13:40) (Chair: Tatemoto Yuji)
13:00– 13:20	G313	Energy saving effect of vertical thin film multiple-effect evaporator (Kansai Chem. Eng.) *(Reg)Kishida Takahiro, (Reg)Noda Hideo, (Reg)Yamaji Hiroshi, (Reg·SPCE)Nishimura Goro	Energy saving Multiple-effect evaporator Thin film evaporation	4-c	213
13:20– 13:40	G314	[Featured presentation] Development of iron rust capture device using swirl flow (Mitsubishi Electric) *(Reg)Yamaguchi Ryusei, Kurihara Kota, Imamura Eiji	Iron oxide Swirl flow Circulating water	4-b	42
(13:40–14:40) (Chair: Hashimoto Kazuki)
13:40– 14:00	G315	Modification treatment of radioactive contaminated soil using pressurized flotation method (Waseda U.) (Reg)Matsukata Masahiko, (Reg)Yamazaki Atsushi, *(Reg)Masada Takenori, Aikawa Mitsuaki, (Matsukura Giken) Matsubara Iwao, Watanabe Katsutoshi	radioactive contaminated soil pressurized flotation method	4-i	160
14:00– 14:20	G316	Evaluation of adsorption characteristics of granular adsorbent for degradation products in oil (Hitachi) *(Reg)Iijima Atsushi, Saito Hayate	Adsorption Degraded oil	4-e	713
14:20– 14:40	G317	[Featured presentation] Solvent extraction of technetium(VII) and rhenium(VII) using tripodal amide-type extractants (JAEA) *(Reg)Shimojo Kojiro, Suzuki Hideya	technetium rhenium solvent extraction	4-f	419
(15:00–16:00) (Chair: Shimojo Kojiro)
15:00– 15:20	G319	Simulation of Ethanol Dehydration Process using Azeotropic Distillation with Benzene Entrainer (Mimura Eng. Consultant Office) *(Reg)Mimura Kenichi, (Utsunomiya U.) (Reg)Sato Takafumi	process simulation azeotropic distillation three phase distillation	4-c	2
15:20– 15:40	G320	Prediction of HETP for Packed Column (TUS) (Reg)Ohe Shuzo	Packed column efficiency HETP	4-c	699
15:40– 16:00	G321	Correlative modeling of local behavior of HETP for a Packed distillation column (Kansai Chem.Eng.) *(Reg)Kataoka Kunio, (Reg)Nishimura Goro, (Reg)Noda Hideo	Packed Distillation Column HETP Control Volume Model	4-c	1
(16:00–16:40) (Chair: Inasawa Susumu)
16:00– 16:20	G322	Investigation of drying characteristics in high-speed mixing dryer for different operational conditions by NIR (near infrared spectroscopy) (Shizuoka U.) *(Reg)Tatemoto Yuji, (Stu)Matsuoka Katsutoshi, Otsuka Makoto, (EarthTechnica) (Cor)Koyanagi Keita	Drying NIR Agitation	4-h	38
16:20– 16:40	G323	Effect of forms of water in coal on water desorption behavior (CRIEPI) *(Cor)Hashimoto Kazuki, (Cor)Sakuragi Kiyoshi, (Cor)Otaka Maromu, (Reg)Yamaguchi Akimasa	forms of water water desorption coal	4-h	110

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SCEJ 89th Annual Meeting (Sakai, 2024)

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