J313 - Hall J, Day 3 - Hall and day program - SCEJ 91st Annual Meeting (Kyoto, 2026)

`SCEJ 91st Annual Meeting (Kyoto, 2026)`

Last modified: 2026-01-20 11:12:38

Meeting Info.
Program
- Program Menu
- Tech. Sessions
- narrow view
- Day 0
- Day 1
- Day 2
- Day 3
By Session
- Session list
- Ceremony/Award
- Gen.S.(Oral)
- Gen.S.(Poster)
  - Poster A
  - Poster B
  - Poster C
  - Poster D
  - Poster E
- SV/SP:Vison/Special
  - SV-1
  - SP-1
  - SP-2
  - SP-3
- SK/K:Intl.Symp.
  - SK-1
  - K-1
  - K-2
  - K-3
  - K-4
  - K-5
  - K-6
- IS:IChES
  - IS-1
- SS:Sess.from Ind.
  - SS-1
  - SS-2
  - SS-3
  - SS-4
  - SS-5
  - SS-6
  - SS-7
- HC/HQ/P:Committee/Hq.
  - HC-11
  - HC-12
  - HQ-21
  - P-1
- F/X:CIT Forum/etc.
  - F-1
  - X-51
  - X-52
By Hall
- Hall list
- Z: [3]CT 1F Hall
  - Z: 1F Hall
- A-B: [37]LIAS Bldg.
  - A: 3F 31
  - B: 3F 32
- D-F: [36]West Wing
- G-N: [36]North Wing
  - G: 2F 28
  - H: 2F 27
  - I: 2F 26
  - J: 2F 25
  - K: 3F 32
  - L: 3F 31
  - M: 3F 38
  - N: 3F 37
- P,Q,R: [3]CT 2F Poster
Search/Index

Hall and day program : Hall J, Day 3 : J313

The chairs are under negotiation.
Yellow-back on the Technical sessions and session list denotes the on-site/virtual hybrid sessions.
All other sessions will be the on-site only sessions.

Hall J(2F 25 ), Day 3(Mar. 19)

8 | 5

Time	Paper ID	Title / Authors	Keywords	Topic code	Ack. number
8. Supercritical fluid
(11:00–11:40)
11:00– 11:20	J307	Development of a prediction model for the partition coefficient in supercritical carbon dioxide extraction (AIST) *(Reg)Fujii Tatsuya, (Reg)Ishizaka Takayuki	Partition coefficient Supercritical carbon dioxide Machine learning	8-c	207
11:20– 11:40	J308	Investigation on treatment conditions for recovery of oils and saccharides from chlorella using hot compressed water (U. Tokyo) *(Reg)Akizuki Makoto, (Stu)Qi Luqing, (Takenaka) (Reg)Kawajiri Satoshi, (U. Tokyo) (Reg)Oshima Yoshito	Hot compressed water Microalgae Reactive extraction	8-d	166
5. Chemical reaction engineering
Organized Session (CVD Reactions Section, Division of Chemical Reaction Engineering)
(13:00–14:40)
13:00– 13:20	J313	Supercritical Fluid Deposition (SCFD) Method for Terahertz Wave Device Formation (Kumamoto U.) *(Stu)Uehara Koki, (Reg)Momose Takeshi	Supercritical Fluid Deposition Supecritical Fluid Extraction Copper Deposition on Polymer	5-h	696
13:20– 13:40	J314	Investigation of Rapid and Conformal Conditions for Cu Film Formation using Supercritical Fluid Deposition on High-Aspect-Ratio Structures (Kumamoto U.) *(Stu)Nakamura Arisa, (Stu)Kondo Sumiya, (Stu)Oda Shota, Nishi Yuta, Yokoyama Akira, (Reg)Momose Takeshi	Supercritical Fluid Deposition Copper Deposition High growth rate	5-h	604
13:40– 14:00	J315	Measurement of Surface Reaction Rate Constanst and Adsorption Equilibrium Constants in Supercritical Fluid Deposition of Cu (Kumamoto U.) *(Stu)Kondo Sumiya, (Stu)Oda Shota, (Kumamoto U./U. Tokyo) Nakamura Arisa, (Kumamoto U.) (Reg)Momose Takeshi	Supercritical Fluid Deposition Copper Deposition Langmuir-Hinshelwood reaction kinetics	5-h	684
14:00– 14:20	J316	Process Informatics Framework for Optimal Control in Supercritical Fluid Deposition(1) (Kumamoto U.) *(Stu)Sanai Seitaro, (Stu)Oda Shota, Hashishin Takeshi, Akai Ichiro, (Reg)Momose Takeshi	Process informatics Physsics-informed Bayesian Optimization Supercritical fluid deposition	5-h	592
14:20– 14:40	J317	Process Informatics Framework for Optimal Control in Supercritical Fluid Deposition(2) (Kumamoto U.) *(Stu)Oda Shota, (Stu)Sanai Seitaro, Hashishin Takeshi, Akai Ichiro, (Reg)Momose Takeshi	Process informatics Physics-informed bayesian optimization Supercritical fluid deposition	5-h	603
(15:00–17:20)
15:00– 15:20	J319	Surface reaction mechanism analysis of SiC chemical vapor deposition using Neural Network Potentials (U. Tokyo) *(Stu)Yoshida Koki, (Reg)Otaka Yuhei, (Reg)Sato Noboru, (Reg)Tamaoki Naoki, (Reg)Tsukune Atsuhiro, (IHI) (Reg)Fukushima Yasuyuki, (U. Tokyo) (Reg)Shimogaki Yukihiro	SiC Chemical Vapor Deposition Neural network potential	5-h	639
15:20– 15:40	J320	Validation of reaction models for the SiC-CVD process using Quadrupole Mass Spectrometry (U. Tokyo) *(Stu)Yoshida Koki, (Reg)Otaka Yuhei, (Reg)Sato Noboru, (Reg)Tamaoki Naoki, (Reg)Tsukune Atsuhiro, (IHI) (Reg)Fukushima Yasuyuki, (U. Tokyo) (Reg)Shimogaki Yukihiro	SiC CVD Quadrupole Mass Spectrometry	5-h	672
15:40– 16:00	J321	Investigation of Low-Temperature AlN Deposition and Thermal Conductivity Enhancement by TMA/NH₃-Based FM-CVD (U. Tokyo) *(Reg)Otaka Yuhei, Lu Yin-Chi, (Stu)Hatakeyama Daiki, (Reg)Yamaguchi Jun, (Reg)Tamaoki Naoki, (Reg)Sato Noboru, (Reg)Tsukune Atsuhiro, (Reg)Shimogaki Yukihiro	AlN CVD 3DIC	5-h	676
16:00– 16:20	J322	Kinetic analysis of CO2-driven ZnO formation using in-situ Raman spectroscopy (Science Tokyo) *(Reg)Orita Yasuhiko, (Stu)Muronosono Aoi, (Reg)Shimoyama Yusuke	In-situ Raman spectroscopy High-pressure CO2 ZnO formation	5-h	202
16:20– 16:40	J323	Control Techniques of selectivity using Hydrazine for SiN-ALD (Kumamoto U./Taiyo Nippon Sanso) *(Stu)Murata Hayato, (Taiyo Nippon Sanso) (Cor)Wada Yoshifumi, (Reg)Shimizu Hideharu, (Kumamoto U.) (Reg)Momose Takeshi	Atomic layer deposition Area selective deposition Hydrazine	5-h	134
16:40– 17:00	J324	Control of a High-Speed Switching Valve for On-Demand Precursor Delivery in ALD (Kumamoto U.) *(Stu)Ishida Kanta, (Kumamoto U./HORIBA STEC) Nishizato Hiroshi, (Kumamoto U.) (Stu)Oda Shota, (HORIBA STEC) Nakaya Yugo, (Kumamoto U.) Nasu Kinichi, Okajima Hiroshi, (Reg)Momose Takeshi	Atomic Layer Deposition Sustainable Valve	5-h	528
17:00– 17:20		CVD reaction subdivision encouragement award ceremony

DispCtl:	Preferences

Screen preferences
Abstract PDFs view (Not effective until abstract open)
Current window
Open another window
Popup view (fit to width)
Popup view (fit to page)
Download
Link panels to Related/Adjacent pages
Show
No show

Technical program
Technical sessions (Wide) (For narrow screen)
Session programs
Search in technical program
SCEJ 91st Annual Meeting (Kyoto, 2026)

www4.scej.org