SCEJ 89th Annual Meeting (Sakai, 2024)
Program search result : Momose T. : 3 programs
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Authors field exact matches “Momose T.”; 3 programs are found.
The search results are sorted by the start time.
| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 1 | D122 | [Invited lecture] Supercritical fluid deposition for semiconductors | Supercritical CO2 Supercritical fluid deposition Semiconductors | K-3 | 771 |
| Day 3 | G305 | Investigation of Co Thin Film Thermal Atomic Layer Etching Process | ALE atomic layer eching cobalt | 5-h | 516 |
| Day 3 | G306 | Investigation of Area Selective Co-ALD process utilizing in-situ observation of reflectance intensity. | ALD in-situ observation reflectance | 5-h | 232 |
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SCEJ 89th Annual Meeting (Sakai, 2024)
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