Japanese page RELOAD
SCEJ

SCEJ 89th Annual Meeting (Sakai, 2024)

Program search result : Saito Takeyasu : 4 programs

The preprints can be viewed by clicking the Paper IDs.
The ID/PW sent to the Registered participants and invited persons are required.

Authors field exact matches “Saito Takeyasu”; 4 programs are found.
The search results are sorted by the start time.

TimePaper
ID
Title / AuthorsKeywordsTopic codeAck.
number
Day 2
9:209:40
F202Evaluation of Reactive sputtered MAX alloy thin films with reducing gas
sputtering
MAX-phase
5-h787
Day 2
16:0016:40
   Chair: Saito Takeyasu, Tomono Kazuaki
K222Relation between electrode slurry and battery performance for all solid-state batteries
All solid-state batteries
11-a396
K223Study on the pH of electrolyte and anion adsorption in ethanol electro-oxidation reaction
Ethanol electro-oxidation
Hydrogen generation
Electrolyte
11-a684
Organized Session (CVD Reactions Section, Division of Chemical Reaction Engineering)
Day 3
9:0010:40
   Chair: Saito Takeyasu
G301Quantitative Analysis of Trimethylaluminum Physisorption for ALD
Atomic Layer Depositon
Quartz Crystal Microbalance
Surface Adsorption
5-h383
G302Study of ZrN thin film formation process using atomic layer deposition
ZrN
ALD
TEMAZ
5-h273
G303Development of Molybdenum Atomic Layer Deposition Process for Next Generation of ULSI Interconnect
Molybdenum
ALD
low resistivity
5-h123
G304Silicon Nitride ALD Process Using High Purity Hydrazine
Siicon Nitride
Atomic Layer Deposition
Incubation Cycle
5-h109
G305Investigation of Co Thin Film Thermal Atomic Layer Etching Process
ALE
atomic layer eching
cobalt
5-h516
Day 3
11:2011:40
G308Surface activation of the copper surface by VUV-Redox method using xenon excimer lamp
VUV-Redo
Surface activation
5-h786
DispCtl: Preferences

Technical program
Technical sessions (Wide)  (For narrow screen)
Session programs
Search in technical program
SCEJ 89th Annual Meeting (Sakai, 2024)


© 2024 The Society of Chemical Engineers, Japan. All rights reserved.
For more information contact Organizing Committee of SCEJ 89th Annual Meeting
E-mail: inquiry-89awww4.scej.org