Japanese page RELOAD
SCEJ

SCEJ 90th Annual Meeting (Tokyo, 2025)

Program search result : Nagai Souga : 1 program

The preprints are now open. These can be viewed by clicking the Paper IDs.
The ID/PW sent to the non-free Registered participants and invited persons are required.
Yellow-back on the Technical sessions and session list denotes the on-site/virtual hybrid sessions.
All other sessions will be the on-site only sessions.

Authors field exact matches “Nagai Souga”; 1 program is found.
The search results are sorted by the start time.

TimePaper
ID
Title / AuthorsKeywordsTopic codeAck.
number
Day 3
9:2011:20
PD369Study of ALD process for Pd thin film and substrate dependence
(U. Tokyo) *(Stu)Nagai Souga, (Reg)Yamaguchi Jun, (Reg)Sato Noboru, (Reg)Otaka Yuhei, (Reg)Tsukune Atsuhiro, (Reg)Shimogaki Yukihiro
palladium
AS-ALD
growth enhancer
5-h345
DispCtl: Preferences

Technical program
Technical sessions (Wide)  (For narrow screen)
Session programs
Search in technical program
SCEJ 90th Annual Meeting (Tokyo, 2025)


© 2025 The Society of Chemical Engineers, Japan. All rights reserved.
For more information contact Organizing Committee of SCEJ 90th Annual Meeting
E-mail: inquiry-90awww4.scej.org