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SCEJ 90th Annual Meeting (Tokyo, 2025)

Program search result : Orisaka M. : 1 program

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Authors field exact matches “Orisaka M.”; 1 program is found.
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TimePaper
ID		Title / AuthorsKeywordsTopic codeAck.
number
Day 3
13:00– 13:20		J313Experiment and Numerical Simulation of the SiN Etching Using HF Vapor
(Screen SPE) *(Reg)Hoda H., Fujiwara H., Taki T., Taki A., Kuroeda A., Orisaka M.
CFD
Vapor Process
Etching
5-h306
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SCEJ 90th Annual Meeting (Tokyo, 2025)

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