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SCEJ 90th Annual Meeting (Tokyo, 2025)

Program search result : Shimizu Hideharu : 1 program

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Authors field exact matches “Shimizu Hideharu”; 1 program is found.
The search results are sorted by the start time.

TimePaper
ID
Title / AuthorsKeywordsTopic codeAck.
number
Day 3
14:4016:20
   Chair: Kawase Motoaki, Shimizu Hideharu
J318Photocatalysis of gas-phase synthesized TiO2 and TiO2+CuO nanoparticulate thin films under various reaction environments
(Hiroshima U.) Hudandini Meditha, (ITS Surabaya) Kusdianto K., (Hiroshima U.) (Reg)Kubo Masaru, *(Reg)Shimada Manabu
PECVD
nanoporous composite
aerosol deposition
5-h268
J319Estimation of surface equilibrium constant and surface reaction rate constant using neural network potential
(U. Tokyo) *(Reg)Sato Noboru, (Stu)Yoshida Koki, (Reg)Otaka Yuhei, (Reg)Tsukune Atsuhiro, (Reg)Shimogaki Yukihiro
machine learned potential
surface kinetics
5-h461
J320Adsorption state study of Trimethylaluminum with neural network potential
(U. Tokyo) *(Stu)Wu Yuxuan, (Reg)Yamaguchi Jun, (Reg)Sato Noboru, (Reg)Tsukune Atsuhiro, (Reg)Shimogaki Yukihiro
ALD
CVD
Surface Adsorption
5-h263
J321Evaluation of initial nucleation and growth of Co-ALD
(U. Tokyo) *(Reg)Tamaoki Naoki, (Reg)Yamaguchi Jun, (Reg)Sato Noboru, (Reg)Tsukune Atsuhiro, (Reg)Shimogaki Yukihiro
atomic layer deposition
initial growth
in-situ observation
5-h551
J322Molybdenum Atomic Layer Deposition Process Development using Mo(CO)6
(U. Tokyo) *(Stu)Obara Soken, (Reg)Yamaguchi Jun, (Reg)Sato Noboru, (Reg)Tsukune Atsuhiro, (Reg)Shimogaki Yukihiro
Mo(CO)6
low resistivity
good step coverage
5-h324
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SCEJ 90th Annual Meeting (Tokyo, 2025)


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