Authors field exact matches “Shimizu Hideharu”; 1 program is found.
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Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
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Day 3 | Chair: | ||||
J318 | Photocatalysis of gas-phase synthesized TiO2 and TiO2+CuO nanoparticulate thin films under various reaction environments | PECVD nanoporous composite aerosol deposition | 5-h | 268 | |
J319 | Estimation of surface equilibrium constant and surface reaction rate constant using neural network potential | machine learned potential surface kinetics | 5-h | 461 | |
J320 | Adsorption state study of Trimethylaluminum with neural network potential | ALD CVD Surface Adsorption | 5-h | 263 | |
J321 | Evaluation of initial nucleation and growth of Co-ALD | atomic layer deposition initial growth in-situ observation | 5-h | 551 | |
J322 | Molybdenum Atomic Layer Deposition Process Development using Mo(CO)6 | Mo(CO)6 low resistivity good step coverage | 5-h | 324 |
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SCEJ 90th Annual Meeting (Tokyo, 2025)