Tamaoki Naoki - Program search result - SCEJ 90th Annual Meeting (Tokyo, 2025)

`SCEJ 90th Annual Meeting (Tokyo, 2025)`

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Program search result : Tamaoki Naoki : 2 programs

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Authors field exact matches “Tamaoki Naoki”; 2 programs are found.
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Time	Paper ID	Title / Authors	Keywords	Topic code	Ack. number
Organized Session (CVD Reactions Section, Division of Chemical Reaction Engineering)
Day 3 13:00– 14:20	Chair: Shimada Manabu, Tamaoki Naoki
	J313	Experiment and Numerical Simulation of the SiN Etching Using HF Vapor (Screen SPE) *(Reg)Hoda H., Fujiwara H., Taki T., Taki A., Kuroeda A., Orisaka M.	CFD Vapor Process Etching	5-h	306
	J314	Density Functional Theory Study on Gas Reactions of Trimethylaluminum and Hydrogen for Aluminum Layer Growth (Kyoto U.) *(Stu)Li Yafei, (Reg)Kawase Motoaki	Aluminum deposition Density functional theory MOCVD	5-h	247
	J315	Study of low-temperature plasma deposition process for Nb thin films (U. Tokyo) *(Stu)Tanaka Jun, (Reg)Yamaguchi Jun, (Reg)Sato Noboru, (Reg)Tsukune Atsuhiro, (Reg)Shimogaki Yukihiro	niobium plasma deposition low-temperature	5-h	313
	J316	An evaluation of high temperature processed Bi-based perovskite thin film for photovoltaic application (Kyoto U.) *(Int)Yang Ziguang, Maeda Ryo, (Reg)Kawase Motoaki	chemical vapor deposition perovskite solar cells chemical reaction engineering	5-h	564
Day 3 15:40– 16:00	J321	Evaluation of initial nucleation and growth of Co-ALD (U. Tokyo) *(Reg)Tamaoki Naoki, (Reg)Yamaguchi Jun, (Reg)Sato Noboru, (Reg)Tsukune Atsuhiro, (Reg)Shimogaki Yukihiro	atomic layer deposition initial growth in-situ observation	5-h	551

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