Supercritical carbondioxide - Program search result - SCEJ 91st Annual Meeting (Kyoto, 2026)

`SCEJ 91st Annual Meeting (Kyoto, 2026)`

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Program search result : Supercritical carbondioxide : 1 program

The preprints(abstracts) are now open (Mar. 3rd). These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants (excludes free registration) and invited persons are required.

Keywords field exact matches “Supercritical carbondioxide”; 1 program is found.
The search results are sorted by the start time.

Time	Paper ID	Title / Authors	Keywords	Topic code	Ack. number
Hall P Day 3 13:30– 15:30	PE307	Cleaning of Semiconductor Manufacturing Equipment Components Using scCO₂ and Its Process Modeling (Kumamoto U.) *(Stu)Matsuoka Takuma, (Kumamoto U. IINa) (Reg)Sasaki Mitsuru, (TKL) Kiba Yukio, (Kumamoto U.) Teruya Kou	Supercritical carbondioxide Cleaning	8-c	637

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SCEJ 91st Annual Meeting (Kyoto, 2026)

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