
Authors field exact matches “Wu Yuxuan”; 3 programs are found. (“Poster with Flash” presentations are double-counted.)
The search results are sorted by the start time.
| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 2 | EE201 | Evaluation of the Effects of Wall Adsorption and Transport Phenomena on QCM-Based Adsorption Kinetics Analysis in ALD | ALD Atomic Layer Deposition QCM | ST-26 | 806 |
| Day 2 | EE202 | Temperature Dependence of TMA Adsorption Kinetics in Al2O3 Atomic Layer Deposition | Atomic Layer Depositon Quartz Crystal Microbalance Surface Adsorption | ST-26 | 336 |
| Day 2 | EE203 | Computation of Al2O3 ALD by trimethylaluminum with Kinetic Monte Carlo and neural network potential | ALD KMC NNP | ST-26 | 726 |
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SCEJ 56th Autumn Meeting (Tokyo, 2025)
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