
Authors and Chairs (J) field exact matches “島田 学”; 3 programs are found. (“Poster with Flash” presentations are double-counted.)
The search results are sorted by the start time.
| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 1 | EE115 | Evaluation of gas detection characteristics of TiO2 nanoparticulate thin films fabricated in gas phase | gas sensor aerosol particle deposition plasma CVD | ST-26 | 672 |
| Day 2 | Chair: | ||||
| EE201 | Evaluation of the Effects of Wall Adsorption and Transport Phenomena on QCM-Based Adsorption Kinetics Analysis in ALD | ALD Atomic Layer Deposition QCM | ST-26 | 806 | |
| EE202 | Temperature Dependence of TMA Adsorption Kinetics in Al2O3 Atomic Layer Deposition | Atomic Layer Depositon Quartz Crystal Microbalance Surface Adsorption | ST-26 | 336 | |
| EE203 | Computation of Al2O3 ALD by trimethylaluminum with Kinetic Monte Carlo and neural network potential | ALD KMC NNP | ST-26 | 726 | |
| EE204 | Reaction Mechanism Analysis of Mo-CVD/ALD using Mo(CO)6 | Mo(CO)6 step coverage interconnect | ST-26 | 405 | |
| EE205 | [Invited lecture] Development of precursors and deposition processes for atomic layer deposition | Atomic Layer Deposition Precursor ABC-type ALD | ST-26 | 606 | |
| Day 3 | ED309 | Fabrication of MOF composite nanofibers by electrospinning and their dye adsorption | Metal-organic framework Electrospinning Nanofiber | SY-81 | 752 |
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SCEJ 56th Autumn Meeting (Tokyo, 2025)
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