Authors field exact matches “Kawakami Masato”; 1 program is found.
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Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
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Day 1 | Chair: | ||||
J113 | [Invited lecture] Fabrication and functionalization of compound semiconductor nanostructures by metal-organic vapor-phase selective growth | vapor-phase selective growth metal-organic vapor compound semiconductor nanostructures | ST-25 | 7 | |
J115 | Molybdenum Atomic Layer Deposition Process Development by Effective Reactant Supply | Molybdenum Atomic Layer Deposition reactant supply | ST-25 | 484 | |
J116 | Kinetic study on Alumina ALD by trimethylaluminum through in-situ Quartz Crystal Microbalance | Atomic Layer Depositon Quartz Crystal Microbalance Surface Adsorption | ST-25 | 821 | |
J117 | Inline Si3H8 generation method for using in CVD / ALD | Generation Si3H8 | ST-25 | 97 | |
J118 | Synthesis and application of Ag nanoparticles on substrates and in gases by vapor deposition | Silver nanoparticles Surface plasmon resonance Vapor deposition | ST-25 | 842 |
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SCEJ 55th Autumn Meeting (Sapporo, 2024)