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SCEJ 55th Autumn Meeting (Sapporo, 2024)
Program search result : Shimogaki Yukihiro : 9 programs
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Authors field exact matches “Shimogaki Yukihiro”; 9 programs are found. (“Poster with Flash” presentations are double-counted.)
The search results are sorted by the start time.
| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 1 | J115 | Molybdenum Atomic Layer Deposition Process Development by Effective Reactant Supply | Molybdenum Atomic Layer Deposition reactant supply | ST-25 | 484 |
| Day 1 | J116 | Kinetic study on Alumina ALD by trimethylaluminum through in-situ Quartz Crystal Microbalance | Atomic Layer Depositon Quartz Crystal Microbalance Surface Adsorption | ST-25 | 821 |
| Day 1 | J122 | Investigation of Co Deposition Process Using CpCo(CO)2 | ALD CVD cobalt | ST-25 | 813 |
| Day 1 | J123 | Advancement of the Time-Lag Method for Quantitative Assessment of Cu Diffusion Barrier Efficacy in Ultrathin Films for ULSI-Cu Interconnects | Time-lag method Barrier property ULSI | ST-25 | 418 |
| Day 1 | J124 | Zr/ZrN thin film deposition process development for ULSI interconnect liner/barrier layer | Zr/ZrN ALD PECVD | ST-25 | 832 |
| Day 2 | Chair: | ||||
| J213 | [Invited lecture] Possibility of low-temperature deposition and processing using radical treatment | 3D-LSI low-temperature process radical treatment | ST-25 | 351 | |
| J215 | Low temperature FM-CVD for high thermal conductive AlN growth for 3DIC | AlN CVD 3DIC | ST-25 | 957 | |
| J216 | Investigation of reaction kinetic equation for film formation in the CVI process for production of SiCf/SiC-CMC | SiC CVI CVD | ST-25 | 826 | |
| J217 | Comprehensive SiC-CVI process development for SiCf/SiC-CMC mass production | SiC CVI CVD | ST-25 | 954 | |
| Day 2 | J215 | Low temperature FM-CVD for high thermal conductive AlN growth for 3DIC | AlN CVD 3DIC | ST-25 | 957 |
| Day 2 | J216 | Investigation of reaction kinetic equation for film formation in the CVI process for production of SiCf/SiC-CMC | SiC CVI CVD | ST-25 | 826 |
| Day 2 | J217 | Comprehensive SiC-CVI process development for SiCf/SiC-CMC mass production | SiC CVI CVD | ST-25 | 954 |
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SCEJ 55th Autumn Meeting (Sapporo, 2024)
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