CVD - Program search result - SCEJ 55th Autumn Meeting (Sapporo, 2024)

`SCEJ 55th Autumn Meeting (Sapporo, 2024)`

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Program search result : CVD : 7 programs

The preprints are now open. These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants and invited persons are required.

Keywords field exact matches “CVD”; 7 programs are found. (“Poster with Flash” presentations are double-counted.)
The search results are sorted by the start time.

Time	Paper ID	Title / Authors	Keywords	Topic code	Ack. number
Day 1 9:00– 12:00	YB138	Synthesis of Vertically Aligned Carbon Nanotubes from Carbon Monoxide (Tokyo Tech) *(Stu)Mochida Aoba, (Reg)Mori Shinsuke, (Yaskawa Electric) Honda Tomokazu, Tanaka Shimpei	Carbon nanotube Carbon monoxide CVD	SY-63	572
Day 1 16:00– 16:20	J122	Investigation of Co Deposition Process Using CpCo(CO)₂ (U. Tokyo) *(Reg)Yamaguchi Jun, (Reg)Sato Noboru, (Reg)Tsukune Atsuhiro, (Reg)Shimogaki Yukihiro	ALD CVD cobalt	ST-25	813
Day 1 16:40– 17:40	YB138	Synthesis of Vertically Aligned Carbon Nanotubes from Carbon Monoxide (Tokyo Tech) *(Stu)Mochida Aoba, (Reg)Mori Shinsuke, (Yaskawa Electric) Honda Tomokazu, Tanaka Shimpei	Carbon nanotube Carbon monoxide CVD	SY-63	572
Day 2 13:40– 14:00	J215	Low temperature FM-CVD for high thermal conductive AlN growth for 3DIC (U. Tokyo) *(Reg)Otaka Yuhei, (Reg)Yamaguchi Jun, (Reg)Sato Noboru, (Reg)Tsukune Atsuhiro, (Reg)Shimogaki Yukihiro	AlN CVD 3DIC	ST-25	957
Day 2 14:00– 14:20	J216	Investigation of reaction kinetic equation for film formation in the CVI process for production of SiC_f/SiC-CMC (U. Tokyo) *(Stu)Yoshida Koki, (Reg)Otaka Yuhei, (Reg)Sato Noboru, (Reg)Tsukune Atsuhiro, (IHI) (Reg)Fukushima Yasuyuki, (U. Tokyo) (Reg)Shimogaki Yukihiro	SiC CVI CVD	ST-25	826
Day 2 14:20– 14:40	J217	Comprehensive SiC-CVI process development for SiC_f/SiC-CMC mass production (U. Tokyo) *(Reg)Otaka Yuhei, (Stu)Yoshida Koki, (Reg)Sato Noboru, (Reg)Tsukune Atsuhiro, (IHI) (Reg)Fukushima Yasuyuki, (U. Tokyo) (Reg)Shimogaki Yukihiro	SiC CVI CVD	ST-25	954
Day 3 10:00– 11:00	YA301	Pore size control of SiC-based membranes by counter diffusion chemical vapor deposition (JFCC) *(Reg)Nagano Takayuki, Satoh Koji	SiC CVD membrane	SY-57	39

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SCEJ 55th Autumn Meeting (Sapporo, 2024)

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