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SCEJ 55th Autumn Meeting (Sapporo, 2024)
Program search result : バリア : 3 programs
The preprints are now open. These can be viewed by clicking the Paper IDs. The ID/PW sent to the Registered participants and invited persons are required.
Title (J) field includes “バリア”; 3 programs are found. (“Poster with Flash” presentations are double-counted.)
The search results are sorted by the start time.
| Time | Paper ID | Title / Authors | Keywords | Topic code | Ack. number |
|---|---|---|---|---|---|
| Day 1 | J123 | Advancement of the Time-Lag Method for Quantitative Assessment of Cu Diffusion Barrier Efficacy in Ultrathin Films for ULSI-Cu Interconnects | Time-lag method Barrier property ULSI | ST-25 | 418 |
| Day 1 | J124 | Zr/ZrN thin film deposition process development for ULSI interconnect liner/barrier layer | Zr/ZrN ALD PECVD | ST-25 | 832 |
| Day 2 | C203 | [Invited lecture] Development of Ultra-High Barrier Film by Solution Process | Barrier film Wet process | SY-77 | 11 |
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SCEJ 55th Autumn Meeting (Sapporo, 2024)
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